Diagnostic method of atmospheric pressure inductively coupled plasma temperature field

Abstract

The invention discloses a diagnostic method of an atmospheric pressure inductively coupled plasma temperature field, and belongs to the field of plasma diagnosis science and technology. The method includes the steps of: acquiring radiation intensity of local points in plasma and a monochromatic grayscale image of a plurality of rotating spectral lines in the whole plasma radiation light, and acquiring a quantitative relational expression between gray values and radiation intensity by utilizing a one-to-one mapping relation between the radiation intensity of the local points and the gray values in the monochromatic grayscale image, further acquiring monochromatic radiation images of a plurality of rotation spectral lines in the plasma radiation light, acquiring molecular rotation temperature, namely gas temperature, of a point by using a Boltzmann slope method for a plurality of monochromatic radiation images of each point, and finally acquiring gas temperature field distribution of the plasma for other points accordingly. According to the method, the problem that the atmospheric pressure inductively coupled plasma temperature field distribution cannot be obtained by the current plasma diagnosis means is solved.

Description

technical field [0001] The invention belongs to the field of plasma diagnosis science and technology, and in particular relates to a diagnosis method of atmospheric pressure inductively coupled plasma temperature field. Background technique [0002] Atmospheric pressure inductively coupled plasma has been widely used in many industries. Only by having a deeper understanding of the physical process of inductively coupled plasma can it be better industrialized. Among the discharge parameters of atmospheric pressure inductively coupled plasma, gas temperature is a very important physical parameter, which directly affects the performance of inductively coupled plasma. Therefore, in order to accurately understand the working state of the atmospheric pressure inductively coupled plasma torch, it is necessary to diagnose the physical parameters of the inductively coupled plasma, especially the molecular rotation temperature, that is, the gas temperature, and accurately obtain the p...

AI Technical Summary

Problems solved by technology

[0006] Aiming at the problems existing in the prior art, the present invention provides a diagnostic method for the temperature field of atmospheric pressure inductively coupled plasma, which solves the problem of atmospheric pressure inductively coupled plasma The temperature field diagnosis problem effectively overcomes the problem that the current plasma diagnosis method cannot obtain the temperature field distribution of the atmospheric pressure inductively coupled plasma

Images