A multifunctional silicon-based liquid crystal chip online detection system and method

Abstract

The invention provides a multifunctional silicon-based liquid crystal chip on-line detection system, in the technical field of silicon-based liquid crystal chip production, including a control module, a detection module, a judgment module, and an output module; The connection is used to control the work of the detection module, judgment module, and output module; the detection module is used for the inspection of incoming wafers and the detection of cells after packaging; the judgment module receives the detection results of the detection module and compares them with the qualified standards. Judgment: The output module receives the detection results and the corresponding judgment results, and feeds back the information classification to the front end and back end of the production line. The detection system and method of the present invention are highly integrated, easy to operate, easy to integrate into each silicon-based liquid crystal chip production line, and timely feed back product quality information to the front-end and back-end production, greatly improving detection efficiency and accuracy, and reducing residual The production of defective products reduces the cost of manufacturers and enhances the competitiveness of the industry.

Description

technical field [0001] The invention relates to the technical field of silicon-based liquid crystal chip production, in particular to a multifunctional silicon-based liquid crystal chip on-line detection system and method. Background technique [0002] Liquid crystal on silicon (LCoS) chips are currently produced mainly in foreign countries. There are only a few wafer packaging production lines and some experimental sample lines in China. The production yield is low and the detection methods are relatively lacking. When the detection efficiency is low, the detection is very scarce, and it is difficult to meet the growing demand for silicon-based liquid crystal chip production. At present, the inspection process of the silicon-based liquid crystal chip production line is mainly in the inspection of incoming wafers, and the single-chip inspection of samples after the wafer packaging is completed. The variety and complexity of customer needs has led to the lack of multi-functio...

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Problems solved by technology

[0002] Liquid crystal on silicon (LCoS) chips are currently produced mainly in foreign countries. There are only a few wafer packaging production lines and some experimental sample lines in China. The production yield is low and the detection methods are relatively lacking. When the detection efficiency is low and the detection is very scarce, it is difficult to meet the growing demand for silicon-based liquid crystal chip production

At present, the inspection process of the silicon-based liquid crystal chip production line is mainly in the inspection of incoming wafers, and the single-chip inspection of samples after the wafer packaging is completed. The variety and complexity of customer needs has led to the lack of multi-functional, convenient, and efficient online real-time monitoring on the production line. The inspection system caused a lot of losses to the production capacity and yield of the packaging production line with only a few wafers

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