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Integrated chip based on multi-waveguide directional coupler and preparation method thereof

A directional coupler, integrated technology, used in semiconductor devices, final product manufacturing, sustainable manufacturing/processing, etc. And the effect of rapid monitoring

Active Publication Date: 2021-07-02
NANJING UNIV OF POSTS & TELECOMM
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

These methods have problems such as large amount of liquid to be measured, many measurement parameters, long measurement time, low measurement accuracy, need to measure liquid in an open or semi-open state, and high operating requirements.

Method used

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  • Integrated chip based on multi-waveguide directional coupler and preparation method thereof
  • Integrated chip based on multi-waveguide directional coupler and preparation method thereof
  • Integrated chip based on multi-waveguide directional coupler and preparation method thereof

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Embodiment Construction

[0030] Objects, advantages and features of the present invention will be illustrated and explained by the following non-limiting description of preferred embodiments. These embodiments are only typical examples of applying the technical solutions of the present invention, and all technical solutions formed by adopting equivalent replacements or equivalent transformations fall within the protection scope of the present invention.

[0031] The present invention discloses a figure 1 The top view of an integrated chip based on a multi-waveguide directional coupler is shown, in which the structure of the multi-waveguide directional coupler 5 on the measurement chip (left side of the section line) and the microchannel structure ( to the right of the hatching). Both the light-emitting diode device 1 and the photodetector 2 have a positive electrode 3 and a negative electrode 4, the positive and negative electrodes are nickel / gold composite metal electrodes, the middle part is a mult...

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Abstract

The invention discloses an integrated chip based on a multi-waveguide directional coupler and a preparation method thereof, the chip takes a wafer as a carrier, the wafer is provided with a light-emitting diode device, the light emitting end of the light-emitting diode device is sequentially provided with an adjusting assembly and a photoelectric detector, the adjusting assembly is composed of a multi-waveguide type directional coupler and a polydimethylsiloxane microfluid channel which is arranged above the multi-waveguide type directional coupler and perpendicularly intersects with the multi-waveguide type directional coupler. Compared with the prior art, the technical scheme adopted by the invention has the beneficial effects that physical parameters such as the refractive index of the liquid to be detected can be effectively and quickly monitored.

Description

technical field [0001] The invention belongs to the field of information materials and technologies, and in particular relates to an integrated chip based on a multi-waveguide directional coupler and a preparation method thereof. Background technique [0002] Commonly used liquid refractive index measurement methods include: grazing incidence method, laser irradiation method, diffraction grating method, optical fiber Young's interferometry, CCD measurement method, etc. These methods have problems such as large amount of liquid to be measured, many measurement parameters, long measurement time, low measurement accuracy, need to measure liquid in an open or semi-open state, and high operating requirements. In recent years, in the fields of medicine and biochemistry, optical waveguides are often used as sensing carriers to measure physical parameters such as refractive index and concentration of liquid samples. The optical waveguide has the characteristics of simple structure,...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L31/173H01L31/0232H01L31/18G01N21/41
CPCH01L31/173H01L31/02327H01L31/1848H01L31/1852G01N21/41Y02P70/50
Inventor 李欣李芸王徐蒋成伟沙源清王永进
Owner NANJING UNIV OF POSTS & TELECOMM