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Monitoring device of optical film preparation

A monitoring device and optical film technology, which is applied in metal material coating process, vacuum evaporation coating, coating, etc., can solve the problems of expensive equipment, high monitoring accuracy, and high cost, and achieve low cost, simplified light control system, The effect of simple structure

Inactive Publication Date: 2006-01-11
HUAZHONG UNIV OF SCI & TECH
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  • Abstract
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  • Application Information

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Problems solved by technology

[0004] The present invention proposes a monitoring device for the preparation of an optical film system, which is realized by simple modification on the optical control system of the existing coating machine, and solves the problem that the existing monitoring device achieves high monitoring accuracy and expensive equipment and high cost

Method used

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  • Monitoring device of optical film preparation
  • Monitoring device of optical film preparation
  • Monitoring device of optical film preparation

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Embodiment Construction

[0021] figure 1 Shown is an embodiment of the present invention, in the figure light source 1, comparison sheet 2, optical fiber 3, monochromator 4, photomultiplier tube 5, film thickness controller 6, crucible or boat 7, film material 8, baffle plate 9. Fixture 10, substrate 11, compound modulation board 12 and vacuum chamber 13. The comparison sheet 2 is a multi-station comparison sheet (the number of stations is greater than 2), which can be rotated during the film preparation process. Wherein except composite modulation board 12, be the ready-made equipment of the photoelectrode value film thickness monitoring system of existing coating machine, as long as the clamp (10) below 10mm ± 5mm position in vacuum chamber (13) install composite modulation board ( 12) The transformation can be completed. Simple and easy.

[0022] Composite modulating plate 12 is formed by stacking two identical circular plates with 18 fan-shaped holes uniformly radially, see attached figure 2 ...

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Abstract

A monitor apparatus for preparing optical film is disclosed. The crucible, barrier, comparing plate and fixture are arranged in vacuum chamber. A rotary composite plate under said fixture is composed of the overlapped two circular plates with M radial and sectorial holes. The incident light from light source is coming via a window of vacuum chamber to comparing plate, reflected out of the vacuum chamber via exit window, coupled to optical fibre, and transmitted to optical signal detector and film thickness controller. Its advantages are real-time monitor, high control precision, and low cost.

Description

technical field [0001] The invention belongs to coating equipment for optical films, in particular to a film layer monitoring device for a coating machine. Background technique [0002] In the preparation process of optical thin films, it is necessary to effectively monitor the refractive index and optical thickness of each film layer of the film system. The timely monitoring methods of the refractive index of thin films include ellipsometer testing, which can be timely monitored but the equipment is expensive; the film thickness monitoring methods include: optical extreme value method, wavelength modulation method, quartz crystal monitoring method and wide-spectrum scanning method. The optical extremum method is the most widely used monitoring method. It directly monitors the optical thickness of the film layer, but the control accuracy is low; the ZZS-700 / G coating machine produced by Chengdu Nanguang Factory is a typical equipment using the optical extremum method , a cr...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/54
Inventor 刘德明聂明局胡必春黎明
Owner HUAZHONG UNIV OF SCI & TECH