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Flexible piezoresistive sensor with multilayer structure and preparation method thereof

A technology of piezoresistive sensor and multi-layer structure, which is applied in the direction of fluid pressure measurement, instrument, and measuring device by changing the ohmic resistance, which can solve the problem of narrow detection range of flexible piezoresistive sensors and achieve the effect of expanding the sensing range

Active Publication Date: 2021-07-09
HUBEI UNIV OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, traditional flexible piezoresistive sensors focus on the pursuit of high sensitivity, while ignoring the problem that the detection range of flexible piezoresistive sensors is too narrow

Method used

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  • Flexible piezoresistive sensor with multilayer structure and preparation method thereof
  • Flexible piezoresistive sensor with multilayer structure and preparation method thereof
  • Flexible piezoresistive sensor with multilayer structure and preparation method thereof

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Embodiment 1

[0049] like figure 1As shown, a flexible piezoresistive sensor with a multilayer structure provided in this embodiment includes two identical flexible piezoresistive multilayer structural parts, which are respectively the first flexible piezoresistive multilayer structural part and the second flexible piezoresistive multilayer structural part. A multilayer structural part; the first flexible piezoresistive multilayer structural part includes a first flexible piezoresistive planar base layer 1, a first antenna structure 4 and a first porous dome structure; the first flexible piezoresistive planar base The upper surface of the bottom layer 1 is connected to the first electrode, and the lower surface of the first flexible piezoresistive planar base layer 1 is sequentially connected to the first porous dome structure and the first antenna structure 4; The resistance multilayer structure part comprises a second flexible piezoresistive planar base layer 5, a second antenna structure...

Embodiment 2

[0057] Such as image 3 As shown, a method for preparing a flexible piezoresistive sensor with a multilayer structure provided in this embodiment includes:

[0058] Step 101: According to the form of the multilayer structure, process the template to obtain a flexible piezoresistive multilayer structure component generation mold. In this embodiment, laser processing is performed on the template to obtain a flexible piezoresistive multilayer structure component generation mold.

[0059] According to the multi-layer structure, the template is processed to obtain a flexible piezoresistive multi-layer structure component generation mold, which specifically includes:

[0060] Performing a first perforation process on the template to obtain a perforated dome generating mold;

[0061] In this embodiment, performing the first punching process on the template to obtain the porous dome generation mold specifically includes: using drawing software to draw the punching aperture, the numb...

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Abstract

The invention discloses a flexible piezoresistive sensor with a multilayer structure and a preparation method of the flexible piezoresistive sensor. The flexible piezoresistive sensor comprises two same flexible piezoresistive multilayer structure components, wherein the first flexible piezoresistive multi-layer structure component includes a first flexible piezoresistive planar substrate layer, a first porous dome structure and a first antenna structure, and the first antenna structure of the first flexible piezoresistive multi-layer structure is in contact with a second antenna structure of the second flexible piezoresistive multi-layer structure. According to the flexible piezoresistive sensor with the multilayer structure, low-range stress change is sensed through contact of the antenna structures, so sensitivity of the sensor is improved; and large-range and extremely large-range stress changes are sensed through contact deformation of the porous dome, so the sensing range of the sensor is expanded.

Description

technical field [0001] The invention relates to the technical field of piezoresistive functional materials, in particular to a flexible piezoresistive sensor with a multilayer structure and a preparation method thereof. Background technique [0002] With the rapid development of industrial intelligence technology, the study of simulating biological mechanoreceptors to perceive environmental information in intelligent devices such as intelligent robots, self-diagnosing instruments, medical and health care electronic equipment, and artificial limbs has attracted more and more attention. Among them, mechanical sensors that convert physical stimuli into measurable electrical signals, as the most important components of this type of smart electronic products, have attracted widespread attention. To this end, relevant researchers have carried out in-depth research and application development on electromechanical response mechanical sensors based on the four main sensing mechanisms...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01L1/22G01L9/04
CPCG01L1/22G01L9/04
Inventor 李靖张洪磊吴天宇李西兴杨奇彪
Owner HUBEI UNIV OF TECH
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