Speed raising control method of molecular pump

Abstract

The invention relates to the technical field of vacuum pump control, in particular to a speed raising control method of a molecular pump. The speed raising control method of the molecular pump comprises the following steps of pre-positioning, open-loop acceleration, open-loop rotation speed detection and closed-loop control, wherein the pre-positioning operation is carried out twice or more than twice in the pre-positioning step, and a rotor of the molecular pump is controlled to be positioned at a target position, so that the successful positioning is ensured, and the speed raising failure is avoided; and the closed-loop control step comprises a closed-loop speed raising process and a steady-speed control process, the closed-loop speed raising process judges whether the motor is out of step or not in real time, if the motor is out of step, the output current is reduced, whether the motor is out of step or not is continuously judged, and corresponding actions are executed according to a real-time judgment result, if the motor is not out of step, whether the current rotating speed of the molecular pump reaches the set rotating speed or not is continuously judged, if the current rotating speed of the molecular pump reaches the set rotating speed, the steady-speed control process is started, if the current rotating speed of the molecular pump does not reach the set rotating speed, the output current is increased, whether the motor is out of step or not is continuously judged, and corresponding actions are executed. According to the speed raising control method of the molecular pump, the speed value of the molecular pump is no longer used as a feedback value in the closed-loop speed increasing process, and the situation that speed raising fails when the motor is out of step is avoided.

Description

technical field [0001] The invention relates to the technical field of vacuum pump control, in particular to a speed-up control method of a molecular pump. Background technique [0002] Molecular pump is a common vacuum obtaining equipment. It uses high-speed rotating blades to transfer momentum to gas molecules, so that the gas generates a directional velocity on the surface of the rigid body, and drives it to the exhaust port, and then is pumped away by the front-stage vacuum. A vacuum pump. [0003] The general structure of the molecular pump motor of the prior art is as attached figure 1 As shown in , it generally includes a stator 1 and a rotor 2, windings A3, B 4, and C 5 connected in a Y shape are wound on the stator, and the stator has three leads: lead R 6, lead G 7 and lead B8, each lead has one end It is connected with one winding, and the other end is connected with the molecular pump controller, and each winding is connected with a common point com9, which is ...

AI Technical Summary

Problems solved by technology

[0010] The purpose of the present invention is to provide a speed-up control method of a molecular pump, which solves the technical problems that the pre-positioning cannot be completed and the speed-up fails in the speed-up control process of the molecular pump in the prior art

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