Composite coating and preparation method, application and preparation system thereof
A composite coating, carbon layer technology, applied in the coating, metal material coating process, gaseous chemical plating and other directions, can solve the problem of poor mechanical strength of the coating
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[0028] The invention provides a kind of preparation method of composite coating, comprises the following steps:
[0029] The solid-state arc source is subjected to arc discharge and then magnetically filtered to obtain arc discharge plasma;
[0030] reacting the arc discharge plasma with a gas source, and co-depositing on the surface of the conductive metal substrate to obtain a composite coating;
[0031] The solid arc source includes one or more of solid carbon source, solid titanium source and solid aluminum source;
[0032] The gas source includes a carbon-containing gas and / or a nitrogen-containing gas.
[0033] In the present invention, unless otherwise specified, all raw material components are commercially available products well known to those skilled in the art.
[0034] In the invention, the solid-state arc source is subjected to arc discharge and then magnetically filtered to obtain arc discharge plasma. In the present invention, the solid arc source includes on...
Embodiment 1
[0055] (1) Fix the aluminum foil 3-3 on the rotatable base 3-2 in the chemical vapor reaction chamber 3-1 after cleaning; vacuum the preparation system to a vacuum degree of 1×10 -4 Pa;
[0056] (2) Use plasma to clean the surface of the aluminum foil 3-3 to remove oil stains and impurities on the surface of the aluminum foil; introduce the solid carbon source 1-2 into the magnetic filter tube 2 for magnetic filtration to obtain carbon plasma; Deposit on the surface of the aluminum foil 3-3, turn off the arc discharge power supply and the magnetic filter power supply, return to the normal pressure state, open the chemical vapor phase reaction chamber 3-1, take out the sample, and obtain carbon-containing aluminum foil on the surface of the aluminum foil.
[0057] Among them, the deposition arc current is 100A, the current of the magnetic filter tube is 1.6A, the negative bias voltage is 160V, and the co-deposition time is 10min.
Embodiment 2
[0059] (1) Fix the aluminum foil 3-3 on the rotatable base 3-2 in the chemical vapor reaction chamber 3-1 after cleaning; vacuum the preparation system to a vacuum degree of 1×10 -4 Pa;
[0060] (2) Use plasma to clean the surface of the aluminum foil 3-3 to remove oil stains and impurities on the surface of the aluminum foil; introduce the solid carbon source 1-2 into the magnetic filter tube 2 for magnetic filtration to obtain carbon plasma; Deposit on the surface of the aluminum foil 3-3, turn off the arc discharge power supply and the magnetic filter power supply, and open the chemical vapor phase reaction chamber 3-1 after returning to the normal pressure state, take out the sample, and obtain a carbon layer on the surface of the aluminum foil; wherein, the deposition arc current 110A, the magnetic filter tube current is 2A, the negative bias is 250V, the flow rate of carbon dioxide is 200ppm, and the co-deposition time is 10min;
[0061] (3) Introduce the solid titanium...
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Abstract
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