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Piezoelectric ceramic actuator

A technology of piezoelectric ceramics and actuators, which is applied in the field of micro-drive applications, can solve problems such as limited use conditions, fragile mechanisms, and inability to withstand torque, so as to prolong the service life and prevent breakage and damage.

Active Publication Date: 2021-08-27
YINGUAN SEMICON TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, this type of piezoelectric ceramic actuator may be subject to tangential force during use, and if the piezoelectric ceramic part is subjected to tangential force or torque force during motion, it is prone to breakage
Therefore, this solution can only be used in a specific environment, the use conditions are limited, and the mechanism is extremely fragile and cannot withstand a certain torque

Method used

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Embodiment Construction

[0035] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention more clear, various implementation modes of the present invention will be described in detail below in conjunction with the accompanying drawings. However, those of ordinary skill in the art can understand that, in each implementation manner of the present invention, many technical details are provided for readers to better understand the present application. However, even without these technical details and various changes and modifications based on the following implementation modes, the technical solution claimed in this application can also be realized.

[0036] In the following description, for the purposes of explaining the various disclosed embodiments, certain specific details are set forth in order to provide a thorough understanding of the various disclosed embodiments. One skilled in the relevant art will recognize, however, that an embodiment may be p...

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Abstract

The invention discloses a piezoelectric ceramic actuator. According to the invention, the piezoelectric ceramic actuator comprises a shell, wherein the interior of the housing is provided with a placement cavity with at least one open end; a first bias part arranged in the placing cavity, wherein the first bias part and the inner bottom surface of the shell are oppositely arranged; and a ceramic piezoelectric assembly which comprises a piezoelectric ceramic piece arranged in the placing cavity and a first contact part connected with one end, facing the first bias piece, of the piezoelectric ceramic piece; after being electrified, the piezoelectric ceramic piece can flexibly deform in the direction from one end, with the opening, of the placing cavity to the inner bottom surface of the shell; and the end, facing the first bias part, of the first contact part is gradually shrunk into a first supporting point, and the first supporting point makes point contact with the first bias part. Compared with the prior art, tangential stress of the actuator in the using process can be avoided, the piezoelectric ceramic actuator can further bear high loads, and the service life is prolonged.

Description

technical field [0001] The invention relates to the technical field of micro-drive applications, in particular to a piezoelectric ceramic actuator. Background technique [0002] As the requirements for high-precision displacement control of various instruments and equipment are getting higher and higher, the demand for actuators with micro-nano precision is also increasing, such as high-precision optical detection equipment, deformable mirrors, scanning motion stages for electron microscopes, membranes, etc. Thickness detection equipment, piezoelectric dispensing equipment, etc. [0003] Piezoelectric ceramic actuator is a new type of micro-displacement device developed in recent years. Chinese patent CN111365621A proposes a piezoelectric actuator for electric shock and electric connection. In principle, it uses the characteristics of physical deformation of piezoelectric ceramics to achieve deformation accumulation by stacking multi-layer ceramic sheets. However, this typ...

Claims

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Application Information

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IPC IPC(8): H02N2/02H02N2/06H02N2/00
CPCH02N2/001H02N2/006H02N2/02H02N2/06
Inventor 左蕾黄孝山王振华许良
Owner YINGUAN SEMICON TECH CO LTD