A high stability single crystal silicon differential pressure sensor

Abstract

The invention discloses a single crystal silicon differential pressure sensor with high stability. The operation box is connected to the base. The operation box is provided with an oil filling pipe, an electrical block, a box body, a pressure chamber and an operator. An oil filling pipe is arranged inside the box body. The oil filling pipe is fitted with the box body, and the electrical block is installed in the box body. On the upper side, the box body is movably connected with the electrical block. If the sensor block is replaced in the present invention, the sensor block will pull the occluder during the process of taking out the sensor block. When the occluder is pulled, it will leave the recess on the medium box Due to the increase of the medium volume, the pressure guiding medium will flow into the groove of the medium box first, and the medium will not be ejected from the installation opening when the sensor block is taken out.

Description

technical field [0001] The invention relates to the field of sensors, in particular to a high-stability single-crystal silicon differential pressure sensor. Background technique [0002] The high-stability single-crystal silicon differential pressure sensor is a detection device that can sense the measured information, and can transform the sensed information into electrical signals or other required forms of information output according to certain rules to meet the needs of the information. requirements for transmission, processing, storage, display, recording and control; [0003] The accommodating space on the pressure cavity of the high-stability single-crystal silicon differential pressure sensor is filled with a pressure-conducting medium, and the sensing block of the device will be worn out during long-term use, and the pressure-conducting medium is susceptible to thermal expansion and contraction due to temperature. , If the wear of the sensing block has a crack, th...

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Problems solved by technology

[0003] The accommodation space on the pressure chamber of the high-stability monocrystalline silicon differential pressure sensor is filled with pressure-guiding medium, and the sensing block of the device will be worn out during long-term use, and the pressure-guiding medium is easy to expand and contract due to temperature , if there is a crack in the wear of the sensing block, the pressure-guiding medium will be sprayed out through the damaged crack of the sensing block, and it is difficult to remove when it adheres to other parts of the equipment

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