Leak inspection device and leak inspection method
An inspection device, inspection room technology, applied in the direction of measuring devices, testing of machine/structural components, instruments, etc., can solve problems such as time required
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[0043] [Schematic Configuration of Leak Inspection Device 1]
[0044] figure 1 It is a schematic configuration diagram of the leak inspection device 1 . The leakage inspection device 1 includes a supply source A, a supply path P1, a reference path P2, a common inspection path P3, branch inspection paths P41 to P43, a common preload path P5, branch preload paths P61 to P63, a supply valve V1, and a reference valve V2. , common inspection valve V3, inspection valves V41-V43, pre-pressure valves V61-V63, exhaust valve Ve, electro-pneumatic regulators R1 and R5, proofreading unit (master) M, differential pressure sensor S and control device 100.
[0045] The supply source A is, for example, an air pump. The supply path P1, the reference path P2, the common inspection path P3, the branch inspection paths P41 to P43, the common preload path P5, and the branch preload paths P61 to P63 are configured by connecting a plurality of pipes. The supply valve V1, the reference valve V2, a...
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