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Processing Apparatus

A technology for processing devices and processed objects, applied in metal processing equipment, automatic grinding control devices, manufacturing tools, etc.

Pending Publication Date: 2021-09-10
DISCO CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] However, when a series of fully automatic operations are performed, it takes time until the processing results and transport status can be confirmed

Method used

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Examples

Experimental program
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Embodiment Construction

[0018] Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. figure 1 The shown processing apparatus 1 has a rough grinding unit 30 and a finish grinding unit 31 by which a wafer 100 held on any one of the chuck tables 5 is ground.

[0019] figure 1 The illustrated wafer 100 is an example of a workpiece, and is, for example, a circular semiconductor wafer. Devices not shown are formed on the front surface 101 of the wafer 100 . The front side 101 of the wafer 100 is in figure 1 The center faces downward and is protected by affixing a protective tape 105 . The back surface 104 of the wafer 100 is a surface to be processed to be subjected to grinding.

[0020] The processing device 1 has a first device base 10 and a second device base 11 disposed behind (+Y direction side) the first device base 10 . On the first device base 10 is a loading / unloading area 401 , which is an area where wafers W are loaded / unloaded. A pro...

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PUM

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Abstract

The present invention provides a processing apparatus with which an operation of part of a full-automatic operation and the results of the partial operation can be confirmed quickly. The processing apparatus includes: a selection section that selects two or more components from a plurality of components including a holding table, a processing unit, a robot, a temporary placing unit, a carrying-in mechanism, a cleaning unit, and a carrying-out mechanism; and a control unit that handles a workpiece at part of routes that correspond to the components selected by the selection section, of the routes for passage of the workpiece at the time of processing the workpiece full-automatically by use of the plurality of components.

Description

technical field [0001] The invention relates to processing devices. Background technique [0002] As disclosed in Patent Document 1, a processing device for automatically processing a workpiece includes, for example, at least: a chuck table that holds the workpiece; and a processing unit that uses a processing tool to process the workpiece. The loading unit, which transports the processed objects to the chuck table; the box loading table, which is used to place the boxes containing the processed objects in a shelf shape; the cleaning unit, which cleans the processed objects a carry-out unit for transporting the workpiece held on the chuck table to the cleaning unit; and a touch panel for inputting processing conditions of the processing device and displaying a processing state. [0003] In such a processing device, when the fully automatic operation starts, the workpiece is taken out of the cassette by the robot and transported to the chuck table by the carrying unit. The ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B24B7/22B24B27/00B24B41/06B24B41/00
CPCB24B7/228B24B27/0076B24B27/0092B24B41/068B24B41/005B24B41/00B24B51/00H01L21/67745H01L21/67276H01L21/67092H01L21/67742H01L21/67766H01L21/67051G05B19/41815H01L21/67769H01L21/68707
Inventor 福士畅之
Owner DISCO CORP
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