Surface shape reconstruction method based on random three-step phase-shifting interference
A technology of phase-shifting interference and phase-shifting interference, which is applied in the field of surface shape reconstruction based on random three-step phase-shifting interference, and can solve problems such as the influence of background light intensity acquisition accuracy
Active Publication Date: 2021-09-14
XIAN TECHNOLOGICAL UNIV
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[0004] The purpose of the present invention is to provide a surface shape reconstruction method based on random three-step phase-shift interference to solve the problem that the existing two-step phase-shift phase demodulation technology is affected by the accuracy of background light intensity acquisition
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[0037] The following examples of the present invention in conjunction with the accompanying drawings, the present invention will be described in detail.
[0038] See figure 1 A three-step shift based on a random surface shape Reconstruction interfere, first randomly three-step phase-shifting interferometry FIG acquired, then these three two-dimensional fringe pattern polynomial algorithm based on the least squares method for solving the phase shift amount δ 1 And δ 2 To obtain the wrapped phase; wrapped phase value finally obtained phase unpacked, using Zernike wavefront fitting algorithm to fit the continuous phase of the operation, the surface shape information to obtain the measurement surface.
[0039] The specific steps include:
[0040] First, the test structures Fizeau interferometer light path, a three-step random phase shift acquired with a CCD camera interference pattern stored in the computer;
[0041] Second, using a random three-step phase-shifting algorithm to step (...
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The invention belongs to the technical field of optical detection, particularly relates to a surface shape reconstruction method based on random three-step phase-shifting interference, and aims to solve the problem that the existing two-step phase shift phase demodulation technology is influenced by background light intensity acquisition precision. The technical scheme provided by the invention comprises: randomly acquiring a three-step phase shift interference pattern, and solving phase shift amounts 1 and 2 for the three interference fringe patterns through an algorithm based on combination of a two-dimensional polynomial and a least square method so as to obtain a wrapped phase; and performing phase unpacking on the obtained wrapped phase value, and performing fitting operation on continuous phases by using a Zernike wave surface fitting algorithm to obtain surface shape information of the surface to be measured. According to the invention, through the difference operation between the interference fringe patterns, the background light intensity is correctly removed, the phase calculation precision is improved, and the method has the accuracy of surface shape recovery and good robustness.
Description
Technical field: [0001] The present invention belongs to the technical field of optical detection, particularly relates to a surface shape reconstruction method based on a random three-step phase-shifting interferometry. Background technique: [0002] Phase shifting interferometry is one of the important means of the optical surface of the detector surface. Conventional phase-shifting interferometry using a single wavelength, and by moving the optical path of the interference optics or other devices to adjust the alignment between the test beam and the reference beam phase difference is changed so as to achieve phase modulation. [0003] Phase shift method can be divided into two categories: hardware phase shift and the frequency phase shift. Hardware generally used to promote the phase-shifting interferometry piezoelectric ceramics, the polarization rotation means, movement of the diffraction grating, or other methods to achieve the inclined flat phase modulation. Frequency and ...
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Login to View More IPC IPC(8): G01B11/25
CPCG01B11/254
Inventor 朱学亮郝怡蕾李靓田爱玲王红军刘丙才
Owner XIAN TECHNOLOGICAL UNIV