The invention relates to the field of high-precision
optical processing, and discloses a three-dimensional
processing system for a high-precision
optical surface with a
random surface shape. The mobility of a work-piece in the vertical direction is enhanced by
software control on the basis of a computer-controlled deterministic
polishing technology, so that the work-piece keeps the invariable
height difference in the
processing process and can ensure the constant removal rate when a large-fluctuation non-planer component is processed. Thus, the high-precision
processing of a non-planer optical curve surface with the
random surface shape is achieved. By adopting the processing
system, the ultra-high precision, with the error is 1 / 100
wavelength, of the
surface shape of an optical component with 10cm*10cm size can be achieved, the processing capability of a root-mean-square (RMS) error at about 1 / 1,000
wavelength can be achieved, and the processing capability of the
random surface shape of the curve surface is achieved. The deterministic processing
system can be applicable to a plurality of different application materials such as an
optical surface and a
semiconductor material film surface, and can become a
manufacturing technology which is convenient, flexible and universal and can be applied to a plurality of industries.