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Deterministic processing system for high-precision optical surface with random surface shape

A high-precision processing and optical surface technology, which is applied in the field of high-precision semiconductor material surface processing and high-precision optical surface processing of any shape, to achieve the effects of convenient operation, low operating cost, and convenient expansion.

Inactive Publication Date: 2014-05-21
黄智 +1
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Problems solved by technology

[0006] The technical problem to be solved by the present invention is to control the height of the undulation of the workpiece on the vertical surface through computer software, and maintain the height difference between the workpiece and the component processing to achieve a constant removal rate when processing large undulations and non-planar components, thereby realizing High-precision machining of arbitrary optical surfaces

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  • Deterministic processing system for high-precision optical surface with random surface shape
  • Deterministic processing system for high-precision optical surface with random surface shape
  • Deterministic processing system for high-precision optical surface with random surface shape

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Embodiment Construction

[0020] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail through the following specific embodiments and with reference to the accompanying drawings.

[0021] The first step, the residence time function algorithm is determined

[0022] figure 2 A flowchart of the algorithm for the residence time function is shown. For ultra-high-precision optical surface processing, it is first necessary to measure the current surface state of the workpiece, which is called the starting surface. This is usually done using ZYGO interferometers or other ultra-high precision measurement techniques. The starting surface function is denoted by S(X,Y). The target surface function is denoted as G(X, Y), and the required surface removal function ΔZ(X, Y) is obtained by subtracting the target surface from the starting surface:

[0023] ΔZ(X, Y)=S(X, Y)-G(X, Y)+d (1)

[0024] where d is an arbit...

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Abstract

The invention relates to the field of high-precision optical processing, and discloses a three-dimensional processing system for a high-precision optical surface with a random surface shape. The mobility of a work-piece in the vertical direction is enhanced by software control on the basis of a computer-controlled deterministic polishing technology, so that the work-piece keeps the invariable height difference in the processing process and can ensure the constant removal rate when a large-fluctuation non-planer component is processed. Thus, the high-precision processing of a non-planer optical curve surface with the random surface shape is achieved. By adopting the processing system, the ultra-high precision, with the error is 1 / 100 wavelength, of the surface shape of an optical component with 10cm*10cm size can be achieved, the processing capability of a root-mean-square (RMS) error at about 1 / 1,000 wavelength can be achieved, and the processing capability of the random surface shape of the curve surface is achieved. The deterministic processing system can be applicable to a plurality of different application materials such as an optical surface and a semiconductor material film surface, and can become a manufacturing technology which is convenient, flexible and universal and can be applied to a plurality of industries.

Description

technical field [0001] The invention relates to the field of high-precision optical processing, in particular to the high-precision optical surface processing of arbitrary shapes and the high-precision semiconductor material surface processing industry. Background technique [0002] The processing accuracy and surface finish of the surface of the optical component are crucial to the performance of the optical component. The precision of traditional optical surface processing often depends on the personal experience of the craftsman and it is extremely difficult to achieve ultra-high precision due to its uncontrollable nature. The new polishing technology developed in recent years, the so-called automated deterministic polishing technology, makes optical polishing controllable and achieves higher precision. Examples of deterministic polishing techniques include magnetorheological finishing (MRF) developed by QED Technologies, Inc. of Rochester, New York, USA, and fluid-jet p...

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Application Information

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IPC IPC(8): B24C5/04
Inventor 黄智汪国年
Owner 黄智
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