Device and method for eliminating signal jitter measured by white light interferometer
A white light interferometer and signal measurement technology, which is applied in the field of optical measurement, can solve problems such as beat frequency jitter, optical delay line scanning non-uniform speed, etc., to achieve the effect of eliminating signal jitter and overcoming non-uniform scanning speed
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Embodiment 1
[0043] Such as figure 1 As shown, the embodiment of the present invention is used to eliminate the device for measuring signal jitter of white light interferometer including white light interferometer, clock module, signal detection and processing module, data acquisition card and computer, wherein white light interferometer includes white light source, measuring arm and reference arm.
[0044] The white light source emits broad-spectrum light, which is divided into two paths and enters the measurement arm and the reference arm respectively;
[0045] The reference arm includes an optical delay line and a compensation fiber. The compensation fiber is used to adjust the arm length difference between the measurement arm and the reference arm. The reference light output by the reference arm interferes with the signal light returned by the event point to be measured in the measurement arm. The first beat frequency signal; the optical delay line can change the optical path of light...
Embodiment 2
[0062] In this example, if figure 2 As shown, the device for eliminating the signal jitter measured by the white light interferometer includes a white light interferometer 16 , a clock module 17 , a signal detection and processing module 13 , a data acquisition card 14 and a computer 15 .
[0063] The white light interferometer specifically includes a white light source 1, a first fiber coupler 2, a measurement arm, a reference arm and a second fiber coupler 5;
[0064] The measuring arm includes a fiber optic circulator 3 . The reference arm includes a first wavelength division multiplexer 8 , an optical delay line 9 , a compensation fiber 10 , and a second wavelength division multiplexer 11 .
[0065] The clock module 17 includes a narrow linewidth laser light source 6 , a reference arm (a reference arm shared with the white light interferometer) and a fourth fiber coupler 12 .
[0066] Specifically, the white light source 1 is connected to the input end of the first opti...
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