A six-axis manipulator for semiconductor cleaning equipment

Abstract

The invention discloses a six-axis manipulator for semiconductor cleaning equipment, which is provided with a support base, and the top of the support base is provided with a first shaft; the six-axis manipulator also includes a movable plate, and the cross section of the movable plate is a "𠃎"-shaped structure , and the horizontal plate of the "𠃎"-shaped movable plate is set on the inner side of the clamping plate through the through groove opened on the surface of the clamping plate; the valve plate is fixed on the other end of the guide rope, and the clamping plate is set There is a sealed fixed chamber; the bottom of the traction rope is fixedly connected with the upper end surface of the valve plate, and the two sides of the connecting chamber are respectively provided with a first air outlet hole and a second air outlet hole. The semiconductor cleaning equipment uses a six-axis manipulator. After clamping the semiconductor device storage device, it can blow off the floating ash inside it by blowing air, which provides convenience for subsequent cleaning. The limit structure of the storage device ensures that it will not fall during transportation.

Description

technical field [0001] The invention relates to the technical field of semiconductor cleaning equipment, in particular to a six-axis manipulator for semiconductor cleaning equipment. Background technique [0002] The cleaning of the semiconductor wafer surface requires the use of specific cleaning equipment, and manual cleaning is not enough to meet the precision and cleanliness requirements. Therefore, it is necessary to set up a robotic mechanism in the cleaning equipment to replace manual operation. The six-axis manipulator can meet the multi-angle and precision requirements in the semiconductor cleaning process through more axial movements. For example, a new six-axis manipulator with the publication number CN213647559U solves the problem that the existing six-axis manipulator does not have the processing axis. Cleaning structure. After some operations in the factory, the operating fixture of the manipulator needs to be cleaned. Manual cleaning is time-consuming and labo...

AI Technical Summary

Problems solved by technology

[0006] The purpose of the present invention is to provide a six-axis manipulator for semiconductor cleaning equipment to solve the above-mentioned background technology. In the process of clamping the semiconductor device storage device, there is no structure for blowing off the floating dust on the surface of the device in the semiconductor device storage device, and It is easy to fall during the transportation process, so the traditional manipulator lacks the problem of maintaining the stability of the semiconductor device storage device after clamping

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