Gas supply device equipped with connector transfer unit and connector coupling method therefor

A gas supply and connector technology, which is applied to a gas supply device equipped with a connector transfer part and its connector combination field, can solve problems such as excessive weight and thread wear, and achieve the effect of minimizing friction

Active Publication Date: 2021-11-23
KC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In this case, if the valve connectors and the piping connectors are integrally transferred when they are joined, since the weight of the transferred parts is too heavy, the connection piping connectors may be damaged due to contact shock when they are joined to the valve connectors. Thread wear occurs

Method used

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  • Gas supply device equipped with connector transfer unit and connector coupling method therefor
  • Gas supply device equipped with connector transfer unit and connector coupling method therefor
  • Gas supply device equipped with connector transfer unit and connector coupling method therefor

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Embodiment Construction

[0077] The present invention will be described in detail below with reference to the accompanying drawings.

[0078] Here, when referring to the direction, the figure 1 The shown X-axis is called the front-back direction, the Y-axis is called the left-right direction, and the Z-axis is called the vertical direction. In addition, the horizontal direction includes the above-mentioned left-right direction and front-rear direction formed by the XY plane. Also, when distinguishing the front and rear directions, the side where the container 10 is arranged is called the front, and the side where the lower module 3 is arranged is called the rear. And, when distinguishing the left and right directions based on the cover separation part 320 and the connector fastening part 330, the side where the cover separation part 320 is arranged is defined as the right side, and the side where the connector fastening part 330 is arranged is defined as the right side. This side is defined as the l...

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PUM

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Abstract

The purpose of the present invention is to provide: a gas supply device provided with a connector transfer unit capable of improving durability of components by minimizing wear of a screw thread when a valve connector and a connecting piping connector are coupled; and a connector coupling method for the gas supply device. In order to implement the same, the gas supply device comprises: a connector fastening part including a connection piping connector, one side and the other side of which are respectively connected to a valve connector and a gas demand point provided in a container, wherein a connection piping connector housing surrounds an outer side of the connection piping connector and is configured to rotate together with the connection piping connector; a first transfer mechanism for transferring the entire connector fastening part in the direction of the valve connector; and a connector transfer unit for transferring the connection piping connector in the direction of the valve connector.

Description

technical field [0001] The present invention relates to a gas supply device equipped with a connector transfer unit and a connector coupling method of the gas supply device, and more specifically, to a connector transfer unit equipped with a connecting pipe connector for transferring a valve connector coupled to a container side The gas supply device and the connector combination method of the gas supply device. Background technique [0002] In general, for devices that supply gas to devices using gas (particularly, where gas is demanded for fine operations such as semiconductor equipment, etc.), types of gas suitable for various purposes are required to satisfy predetermined concentrations, pressures, and the like. [0003] In order to efficiently supply such gases, many kinds of gases are kept under high pressure. In particular, gases with harmful properties such as flammability, toxicity, and corrosion are strictly managed in separate spaces separated from humans. [000...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): F17C13/06F17C13/00F17C13/04
CPCF17C13/06F17C13/00F17C13/04F17C2223/0123F17C2270/0518F17C7/02H01L21/67017F17C2205/037F17C2201/0104F17C2201/056
Inventor 朴用建李祥煜金容澈徐彻教金相镇
Owner KC
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