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Normal incidence phase-shifted deflectometry sensor, system, and method for inspecting a surface of a specimen

A sensor and normal incidence technology, applied in the direction of measuring devices, material analysis through optical means, instruments, etc., can solve the problem of increasing the total cycle time of test pieces

Pending Publication Date: 2021-12-07
CARL ZEISS IND METROLOGY LLC
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Problems solved by technology

This means that more inspection "postures" are required for the imaging of each larger area on the test surface and thus significantly increases the overall cycle time for the inspection of the test piece

Method used

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  • Normal incidence phase-shifted deflectometry sensor, system, and method for inspecting a surface of a specimen
  • Normal incidence phase-shifted deflectometry sensor, system, and method for inspecting a surface of a specimen
  • Normal incidence phase-shifted deflectometry sensor, system, and method for inspecting a surface of a specimen

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Embodiment Construction

[0039] The same reference numerals below represent elements with the same or similar technical features.

[0040] Figure 2A A schematic diagram showing a top view of a normal incidence PSD sensor 200 for optical inspection of the surface of a sample. Normal incidence PSD sensor 200 includes illumination source 220 , imaging sensor 230 , light absorber 240 , beam splitter 250 , and imaging optics 260 .

[0041] Normal incidence PSD sensor 200 may range in height and width between 80 millimeters (mm) and 130 mm, and in length between 400 mm and 500 mm, and it may be placed during normal operation At a distance of approximately 43 mm from the surface to be inspected. This configuration can reduce defocus and blurring effects that may be encountered when operating normal incidence PSD sensor 200 in a soft microscope setup.

[0042] Such as Figure 2A As shown, the illumination source 220 is arranged on one side of the beam splitter 250 and the light absorber 240 is arranged o...

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Abstract

A system for inspecting a surface of a specimen includes a normal incidence phase-shifted deflectometry (PSD) sensor including an imaging sensor, a beam splitter, and an imaging optic arranged between the imaging sensor and the beam splitter. The illumination source illuminates the specimen with a light pattern and is arranged perpendicular to the surface of the specimen. The imaging sensor captures the light pattern reflected from the surface of the specimen in a sensor image. The beam splitter directs a first portion of the light from the illumination source to the optical absorber, a second portion of the light from the illumination source to the surface of the specimen, and the light pattern reflected from the surface of the specimen to the imaging sensor. A data processing apparatus in communication with the normal incidence PSD sensor determines properties of the surface of the specimen based on the sensor image.

Description

[0001] Cross references to related patent applications [0002] This application claims priority to U.S. Patent Application No. 16 / 396,490, filed April 26, 2019, the disclosure of which is incorporated herein by reference in its entirety. technical field [0003] The present invention relates to a normal incidence phase shift deflection (PSD) sensor for inspecting a surface of a sample, a system for inspecting a surface of a sample using a normal incidence PSD sensor, and a system for using The normal incidence PSD sensor is used to inspect the surface of the sample. Background technique [0004] White light surface inspection systems have been developed for high-throughput and highly automated manufacturing of products with decorative and technical surfaces. These systems facilitate a high degree of sensitivity to even the smallest changes in form and gloss on countless types of surfaces and finishes. [0005] figure 1 A conventional phase-shift deflection measurement de...

Claims

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Application Information

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IPC IPC(8): G01N21/88
CPCG01N21/8806G01N2021/8829G01N2201/062
Inventor D·施尔茨N·罗伊森
Owner CARL ZEISS IND METROLOGY LLC
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