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Capacitive vacuum gauge stability test auxiliary device and test method

A technology for stability testing and auxiliary devices, which can be used in measuring devices, measuring fluid pressure, instruments, etc., and can solve problems such as low testing efficiency

Active Publication Date: 2021-12-21
BEIJING CHENJING ELECTRONICS
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  • Abstract
  • Description
  • Claims
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Problems solved by technology

[0005] The invention provides an auxiliary device for testing the stability of a capacitance vacuum gauge and a testing method, which are used to solve the defect of low test efficiency existing in the detection of the stability of a capacitance vacuum gauge in the prior art

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  • Capacitive vacuum gauge stability test auxiliary device and test method
  • Capacitive vacuum gauge stability test auxiliary device and test method

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Embodiment Construction

[0038] In order to make the objectives, technical solutions and advantages of the present invention clearer, the technical solutions in the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are part of the embodiments of the present invention. , not all examples. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

[0039] Combine below figure 1 An auxiliary device for testing the stability of a capacitive vacuum gauge according to an embodiment of the present invention is described.

[0040] like figure 1As shown, the embodiment of the present invention provides an auxiliary device for testing the stability of a capacitive vacuum gauge, which is used to provide a vacuum environment for the gauge to be measured 3 during the ...

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Abstract

The invention provides a capacitance vacuum gauge stability test auxiliary device and a test method. The capacitance type vacuum gauge stability test auxiliary device comprises a connecting part which comprises a sealed cavity and a plurality of connecting branches, wherein the connecting branches are arranged in parallel, the first ends of the connecting branches are communicated with the sealed cavity, each connecting branch is provided with a connecting position, a first stop valve and a second stop valve, the connecting position is located between the first stop valve and the second stop valve, and the first stop valve is located between the connecting position and the sealing cavity; a first vacuum pump set which is used for vacuumizing the interior of the connecting branches; a second vacuum pump set which is used for vacuumizing the sealing cavity; and a gas backfilling system which can backfill gas to the sealing cavity and the connecting branches, wherein the second ends of the connecting branches communicate with one another and are connected with the first vacuum pump set and the gas backfilling system. The problem that in the prior art, the testing efficiency is low when the stability of the capacitive vacuum gauge is detected is solved.

Description

technical field [0001] The invention relates to the technical field of testing devices, in particular to an auxiliary device and a testing method for stability testing of capacitive vacuum gauges. Background technique [0002] Capacitive vacuum gauge is a sensor for measuring vacuum, and its stability directly affects the measurement accuracy of capacitive vacuum gauge. At present, the stability evaluation of high-precision capacitive vacuum gauges is mainly achieved by connecting the gauge to be measured to a device capable of achieving high vacuum, and then measuring the output value for a long time after the temperature control is stable for a period of time. When testing the stability of the vacuum gauge in the prior art, it is necessary to connect the vacuum gauge to a vacuum device, provide a vacuum environment for the vacuum gauge through the vacuum device, and then use a corresponding testing system to test the stability of the vacuum gauge. [0003] In the prior ar...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01L27/00
CPCG01L27/00
Inventor 陶硕林立男张琳琳高乐刘旭强张永斌
Owner BEIJING CHENJING ELECTRONICS
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