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Capacitive vacuum gauge stability test auxiliary device and test method

A technology for stability testing and auxiliary devices, which can be used in measuring devices, measuring fluid pressure, instruments, etc., and can solve problems such as low testing efficiency

Active Publication Date: 2022-03-11
BEIJING CHENJING ELECTRONICS
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] The invention provides an auxiliary device for testing the stability of a capacitance vacuum gauge and a testing method, which are used to solve the defect of low test efficiency existing in the detection of the stability of a capacitance vacuum gauge in the prior art

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  • Capacitive vacuum gauge stability test auxiliary device and test method
  • Capacitive vacuum gauge stability test auxiliary device and test method

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Embodiment Construction

[0038] In order to make the purpose, technical solutions and advantages of the present invention clearer, the technical solutions in the present invention will be clearly and completely described below in conjunction with the accompanying drawings in the present invention. Obviously, the described embodiments are part of the embodiments of the present invention , but not all examples. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without creative efforts fall within the protection scope of the present invention.

[0039] Combine below figure 1 The auxiliary device for testing the stability of a capacitance vacuum gauge according to an embodiment of the present invention is described.

[0040] Such as figure 1As shown, the embodiment of the present invention provides a capacitive vacuum gauge stability test auxiliary device, which is used to provide a vacuum environment for the gauge 3 to be tested du...

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Abstract

The invention provides an auxiliary device for testing the stability of a capacitive vacuum gauge and a testing method, wherein the auxiliary device for testing the stability of a capacitive vacuum gauge includes a connection part, a sealed chamber and a plurality of connection branches, and the plurality of connection branches are arranged in parallel , and the first ends are all in communication with the sealed chamber, and the connection branch is provided with a connection position, a first stop valve and a second stop valve, the connection position is located between the first stop valve and the second stop valve, and the first stop valve is located at Between the connection position and the sealed chamber; the first vacuum pump group is used for vacuuming the inside of the connecting branch; the second vacuum pump group is used for vacuuming the sealed chamber; the gas backfill system can be used to The sealed chamber and the connection branch are backfilled with gas, and the second ends of each connection branch communicate with each other and are connected with the first vacuum pump group and the gas backfill system. The problem of low testing efficiency existing in testing the stability of the capacitance vacuum gauge in the prior art is solved.

Description

technical field [0001] The invention relates to the technical field of testing devices, in particular to an auxiliary device for testing the stability of a capacitance vacuum gauge and a testing method. Background technique [0002] The capacitive vacuum gauge is a sensor for measuring vacuum, and its stability directly affects the measurement accuracy of the capacitive vacuum gauge. At present, the stability evaluation of high-precision capacitive vacuum gauges is mainly achieved by connecting the gauge to be tested to a device that can achieve high vacuum, and then measuring its output value for a long time after the temperature control has stabilized for a period of time. In the prior art, when testing the stability of the vacuum gauge, it is necessary to connect the vacuum gauge to a vacuum device, provide a vacuum environment for the vacuum gauge through the vacuum device, and then use a corresponding test system to test the stability of the vacuum gauge. [0003] In t...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01L27/00
CPCG01L27/00
Inventor 陶硕林立男张琳琳高乐刘旭强张永斌
Owner BEIJING CHENJING ELECTRONICS
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