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Ultrasonic transducer array and method of forming same

A technology of ultrasonic transducers and arrays, applied in piezoelectric/electrostrictive transducers, sensors, sensor types, etc., to achieve the effects of improving transmission efficiency, increasing sound power, and reducing crosstalk

Active Publication Date: 2022-02-01
SHANGHAI JIAO TONG UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] In view of this, the application provides an ultrasonic transducer array and its forming method to

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  • Ultrasonic transducer array and method of forming same
  • Ultrasonic transducer array and method of forming same
  • Ultrasonic transducer array and method of forming same

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[0030] As mentioned in the background art, the performance of the existing ultrasonic transducer array needs to be further improved. In order to solve the above problems, this application proposes a new ultrasonic transducer and its forming method, which introduces a cylinder structure to improve the ultrasonic emission efficiency and bandwidth of the ultrasonic transducer array and reduce the crosstalk level, thereby increasing the output power.

[0031] The technical solutions in the embodiments of the present application will be clearly and completely described below in conjunction with the accompanying drawings. Apparently, the described embodiments are only some of the embodiments of the present application, not all of them. Based on the embodiments in this application, all other embodiments obtained by those skilled in the art without making creative efforts belong to the scope of protection of this application. In the case of no conflict, the following embodiments and t...

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Abstract

The invention discloses an ultrasonic transducer array and a forming method thereof, and the composition unit of the ultrasonic transducer array comprises a supporting layer which is internally provided with a back cavity; a piezoelectric sensing unit which is located on the surface of the supporting layer and is opposite to the back cavity in position, the piston structure is located at the top of the piezoelectric sensing unit, and the piston structure comprises a supporting column located at the top of the piezoelectric sensing unit and a piston plate supported above the piezoelectric sensing unit by the supporting column; and a cylinder wall which is positioned on the surface of the supporting layer and surrounds the periphery of the piezoelectric sensing unit. The ultrasonic transducer array has relatively high ultrasonic transmitting efficiency and bandwidth, and relatively low crosstalk level exists between the units.

Description

technical field [0001] The present application relates to the technical field of transducers, in particular to an array of ultrasonic transducers and a method for forming the same. Background technique [0002] The ultrasonic piezoelectric transducer can vibrate under the action of a driving voltage, and the vibration can be transmitted through a medium (such as water, or a human body, etc.). As a reverse application, the sound wave acting on the ultrasonic piezoelectric transducer can also generate an electrical signal, and the sound wave acting on the ultrasonic transducer can be reproduced by reading and identifying the electrical signal. Based on the above principles, ultrasonic piezoelectric transducers can perform two-way conversion of electrical and acoustic signals, and are widely used in fields including microphones, speakers, gesture recognition, ultrasonic imaging, and fingerprint recognition. [0003] Piezoelectric ultrasonic transducers obtained based on microm...

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Application Information

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IPC IPC(8): H04R17/00
CPCH04R17/00
Inventor 王续博刘悦
Owner SHANGHAI JIAO TONG UNIV
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