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FPI batch test system and test method thereof

A technology of batch testing and detection window, applied in the direction of measuring electricity, measuring devices, measuring electrical variables, etc., can solve the problem of low efficiency of FPI testing, and achieve the effect of improving batch testing efficiency, improving testing efficiency and facilitating mass production.

Pending Publication Date: 2022-03-01
SHEN ZHEN HYPERNANO OPTICS TECH CO LTD
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Problems solved by technology

[0003] In order to solve the problem that the existing FPI testing efficiency is low, the application provides a kind of FPI batch testing system and testing method thereof, to improve the testing efficiency of FPI

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  • FPI batch test system and test method thereof

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Embodiment Construction

[0020] The characteristics and exemplary embodiments of various aspects of the present invention will be described in detail below. In order to make the purpose, technical solutions and advantages of the present invention more clear, the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only configured to explain the present invention, not to limit the present invention. It will be apparent to one skilled in the art that the present invention may be practiced without some of these specific details. The following description of the embodiments is only to provide a better understanding of the present invention by showing examples of the present invention.

[0021] It should be noted that in this article, relational terms such as first and second are only used to distinguish one entity or operation from another entity or operation, and ...

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Abstract

The invention provides an FPI batch test system. The system comprises a controller, a first multiplexer, a second multiplexer and an FPI bearing module, the FPI bearing module comprises m transverse gate lines, n vertical gate lines and an FPI carrier array composed of m rows and n columns of FPI carriers, and the FPI carrier array is used for bearing FPIs to be tested so as to form an FPI array; one ends of the m transverse gating lines are electrically connected with the first multiplexer, the other ends of the m transverse gating lines are respectively connected in parallel with n FPIs of the corresponding rows of the FPI array, one ends of the n vertical gating lines are electrically connected with the second multiplexer, and the other ends of the n vertical gating lines are respectively connected in parallel with m FPIs of the corresponding columns of the FPI array; the system also comprises an imaging device which is used for collecting an interference image of the FPI array. According to the invention, the FPI bearing module is established, the FPI gating array is constructed based on the multiplexer, the difference between individuals is compatible, and the batch test requirement of FPI is met, so that the test efficiency of FPI is greatly improved.

Description

technical field [0001] The invention belongs to the field of FPI testing, and in particular relates to an FPI batch testing system and a testing method thereof. Background technique [0002] The optical principle of FPI (Fabry-Perot interferometer) is based on the principle of Fabry-Perot interference. The spectroscopic chip is made by semiconductor integrated circuit technology, and the chip is driven with different voltages to obtain different narrow-wave spectra. FPI needs to go through multiple rounds of testing before the finished product, and each round of testing takes a lot of time, and there are individual differences between different FPIs, making compatible batch testing impossible, resulting in low testing efficiency of FPIs, which is not conducive to the batching of FPIs Production. Therefore, how to improve the testing efficiency of FPI has become an important issue. Contents of the invention [0003] In order to solve the problem of low test efficiency of ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01R31/01
CPCG01R31/01
Inventor 黄锦标林琳郭斌
Owner SHEN ZHEN HYPERNANO OPTICS TECH CO LTD
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