Micropositioner and motion device

A technology of micro-motion table and driving device, which is applied in the direction of generator/motor, piezoelectric effect/electrostrictive or magnetostrictive motor, program-controlled manipulator, etc., which can solve the problem of magnetic interference, heavy load and limited space and other problems to achieve the effect of avoiding magnetic field interference, solving limited space and compact structure

Active Publication Date: 2022-03-01
YINGUAN SEMICON TECH CO LTD
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The purpose of the present invention is to provide a micro-motion stage and motion device with a flat structure, applicable to heavy loads, and drive

Method used

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  • Micropositioner and motion device
  • Micropositioner and motion device
  • Micropositioner and motion device

Examples

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[0043] The present invention is further detailed below with reference to the accompanying drawings and examples. It will be appreciated that the specific embodiments described herein are merely illustrative of the invention and are not limited thereto. It will also be also to be described, and only the parts associated with the present invention are shown in the drawings rather than all structures.

[0044] In the description of the present invention, the term "connected", "connection", "fixed", unless otherwise specified, "connected", "fixed", for example, may be a fixed connection, or a detachable connection, or integral However, it can be a mechanical connection or an electrical connection; it can be directly connected, or the intermediate medium can be indirectly connected, which may be a communication between two elements or two components. Relationship. The specific meaning of the above terms in the present invention will be appreciated to those skilled in the art.

[0045] ...

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Abstract

The invention discloses a micropositioner and a motion device, and relates to the technical field of precision motion. The micropositioner comprises a middle seat, a fixed base, a bearing table, a horizontal driving device, a vertical driving device and a gravity compensation device, and a containing groove is formed in the bottom of the middle seat; the fixed base is located in the containing groove, and avoiding holes are formed in the groove bottom of the containing groove and/or the fixed base. The bearing table is mounted above the middle seat; the horizontal driving device is a piezoelectric driving device and is arranged in the avoiding hole; the vertical driving device is a piezoelectric driving device and is located on the circumferential outer side of the containing groove, and the lower end of the vertical driving device extends into and is installed in the middle base. The lower end of the gravity compensation device extends into the middle base and is located on the circumferential outer side of the containing groove, and the upper end of the gravity compensation device extends out of the upper end face of the middle base and is connected with the bearing table. The loading problem is effectively solved through the gravity compensation device, the height of the whole device is reduced through the flat design, and the structure is more compact.

Description

technical field [0001] The invention relates to the technical field of precision motion, in particular to a micro-motion table and a motion device. Background technique [0002] With the development of science and technology, in the field of precision motion, the piezoelectric motor represented by the inverse piezoelectric effect is gradually taking the core position of the actuator together with the electromagnetic motor due to its unique advantages. [0003] In the field of precision displacement, piezoelectric drive technology has the characteristics of no magnetic interference, and under the same driving force, piezoelectric motors are significantly smaller than electromagnetic motors, and require less space. However, some applications (such as micro-motion table) have very strict requirements on space, but the load is relatively heavy. Although the piezoelectric motor with large load can drive heavy loads, it cannot be applied to motion devices due to space constraints....

Claims

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Application Information

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IPC IPC(8): H02N2/02H02N2/04B25J9/00
CPCH02N2/028H02N2/043B25J9/0096
Inventor 郝凌凌王振华
Owner YINGUAN SEMICON TECH CO LTD
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