Lens system

A lens system and lens technology, applied in optics, instruments, refractive power measurement, etc., can solve the problem of shrinking to 0.2mm and cannot be further reduced, and achieve the effect of eliminating spherical aberration and chromatic aberration

Pending Publication Date: 2022-03-22
INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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Problems solved by technology

[0004] At present, the diameter of the standard measurement beam of the ellipsometer is about 4mm, and the manufacturer of the ellipsometer can generally provide a condenser lens for reducing the diameter of the measurement beam, but even if such a condenser lens is used, the diameter of the measurement beam is still small. It can only be reduced to 0.2mm (that is, the beam diameter at the sample to be measured) and cannot be further reduced

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Embodiment Construction

[0030] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be described in further detail below in conjunction with specific embodiments and with reference to the accompanying drawings. Apparently, the described embodiments are some, but not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

[0031] The terminology used herein is for the purpose of describing particular embodiments only, and is not intended to be limiting of the invention. The terms "comprising", "comprising", etc. used herein indicate the presence of stated features, steps, operations and / or components, but do not exclude the presence or addition of one or more other features, steps, operations or components.

[0032] In the present inve...

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Abstract

The invention provides a lens system, and relates to the technical field of optical measuring instruments. The lens system is arranged on an ellipsometer and comprises a convergent mirror group and a recovery mirror group, the ellipsometer is provided with a transmitting measurement arm and a receiving measurement arm, the convergent mirror group is arranged on an output light path of the transmitting measurement arm, and the recovery mirror group is arranged on an input light path of the receiving measurement arm; the emission measuring arm is used for generating incident parallel light beams, the convergent mirror group is used for converging the incident parallel light beams, the converged light beams are reflected by a measured sample to form divergent light beams, the recovery mirror group is used for recovering the divergent light beams into emergent parallel light beams, and the receiving measuring arm is used for receiving the emergent parallel light beams. According to the invention, the diameter of a measurement light beam of the ellipsometer can be reduced to 0.015-0.05 mm in a spectral range of 300-700 nm and a view field range of + / -1.8 degrees, so that the measurement resolution is improved.

Description

technical field [0001] The invention relates to the technical field of optical measuring instruments, in particular to a lens system. Background technique [0002] Ellipsometer is an optical measuring device used to measure the thickness, refractive index, extinction coefficient and other parameters of thin films. An important parameter of the ellipsometer is the diameter of the measuring beam, which determines the measurement resolution of the ellipsometer. The smaller the diameter of the measurement beam, the higher the measurement resolution; the larger the diameter of the measurement beam, the lower the measurement resolution. When the measurement beam of the ellipsometer is irradiated on the film sample, a spot will be formed on the sample. The larger the diameter of the measurement beam, the larger the spot, and the smaller the diameter of the measurement beam, the smaller the spot. The ellipsometer cannot subdivide the spot area, but can only measure the spot area a...

Claims

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Application Information

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IPC IPC(8): G02B27/28G02B27/00G01M11/02
CPCG02B27/28G02B27/0025G01M11/0228Y02P70/50
Inventor 罗先刚袁理孔维杰刘玲刘凯鹏高平
Owner INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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