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Modularized differential flexible displacement reduction mechanism with input and output in same direction or reverse direction

An input-output, displacement reduction technology, applied in opto-mechanical equipment, patterned surface photoengraving process, micro-lithography exposure equipment and other directions, can only reach tens or hundreds of nanometers, difficult to meet ultra-high positioning accuracy , It is difficult for the nano-positioning platform to achieve nano-level precision, etc., to achieve the effect of simple structure, improved resolution and precision

Active Publication Date: 2022-04-05
XI AN JIAOTONG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, it is difficult for the nano-positioning platform composed of traditional rigid components to achieve nanometer-level precision, while the current positioning platform based on flexible mechanisms is generally composed of piezoelectric actuators and displacement amplification mechanisms, and the motion accuracy can only reach tens or hundreds of nanometers. Meet the requirements for ultra-high positioning accuracy

Method used

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  • Modularized differential flexible displacement reduction mechanism with input and output in same direction or reverse direction
  • Modularized differential flexible displacement reduction mechanism with input and output in same direction or reverse direction
  • Modularized differential flexible displacement reduction mechanism with input and output in same direction or reverse direction

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Embodiment 1

[0051] exist figure 2 In the embodiment, the forward movement module 1 and the reverse movement module 2 of the present invention are respectively a double-lever module and a half-bridge module, and the double-lever module and the half-bridge module are connected by flexible hinges.

[0052] The double lever module includes a lever input end as the input end 3 of the forward movement module and two lever mechanisms, and the two lever mechanisms are symmetrically arranged on both sides of the lever input end.

[0053] The lever mechanism includes a lever output end and a lever support block 10 as the output end 4 of the forward movement module. The lever support block 8 is arranged outside the lever input end. One end of the lever support block 8 is fixed, and one end is connected with the lever output end through a flexible hinge.

[0054] The half-bridge module includes a half-bridge output end as the output end 6 of the reverse motion module and a flexible branch chain as t...

Embodiment 2

[0068] exist Figure 8 In the embodiment, the forward movement module 1 and the reverse movement module 2 of the present invention are respectively a lever module and a double Scott-Russell module, and the lever module and the double Scott-Russell module are connected by a flexible hinge.

[0069] The double lever module includes a lever input end as the input end 3 of the forward movement module and two lever mechanisms, and the two lever mechanisms are symmetrically arranged on both sides of the lever input end.

[0070] The lever mechanism includes a lever output end and a lever support block 10 as the output end 4 of the forward movement module. The lever support block 8 is arranged outside the lever input end. One end of the lever support block 8 is fixed, and one end is connected with the lever output end through a flexible hinge.

[0071] The double Scott-Russell module includes a Scott-Russell output terminal as the output terminal 6 of the reverse motion module, two S...

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Abstract

The invention discloses a modular differential flexible displacement reduction mechanism with input and output in the same direction or in the reverse direction. The modular differential flexible displacement reduction mechanism comprises a forward motion module, a reverse motion module and a driver. Two ends of the forward motion module are respectively connected to one end of the reverse motion module; differential superposition of displacement is achieved through combination of the forward motion module and the reverse motion module, a large displacement reduction ratio can be obtained, and therefore the resolution ratio and precision of motion are greatly improved; the device can be matched with a macro-motion platform, and large-range and ultrahigh-precision motion positioning is achieved.

Description

technical field [0001] The invention belongs to the field of precision drive and transmission, and in particular relates to a modular differential flexible displacement reduction mechanism with input and output in the same or opposite directions. Background technique [0002] In industries such as precision manufacturing and precision measurement, the requirements for positioning accuracy and repeat positioning accuracy of devices have reached the nanometer level. Therefore, accurate and reliable nanometer-level positioning mechanisms have broad application prospects. [0003] Taking the lithography machine in the chip field as an example, the positioning accuracy requirements for core components such as the workpiece table have reached several nanometers, and its motion control accuracy and motion speed directly affect the engraving accuracy of the circuit. However, it is difficult for the nano-positioning platform composed of traditional rigid components to achieve nanomet...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G03F7/20
CPCG03F7/70725G03F7/70758B25J7/00H02N2/043B25J9/1065H02N2/0005
Inventor 陈贵敏李玲玲吴厚旗
Owner XI AN JIAOTONG UNIV
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