Detection device and method for focusing and leveling of optical system

Abstract

The invention provides a detection device for focusing and leveling of an optical system. The detection device sequentially comprises a light source, a first PBS prism, a 1 / 4 wave plate, a test plate, a 1 / 2 wave plate, a beam splitter prism and a detector in the light path direction. Wherein S polarized light emitted by the light source is reflected by the first PBS prism to the 1 / 4 wave plate, the 1 / 4 wave plate converts the S polarized light into circularly polarized light, the circularly polarized light penetrates through the optical system to be tested, is reflected by the test plate, penetrates through the optical system to be tested again and returns to the 1 / 4 wave plate, and the 1 / 4 wave plate converts the circularly polarized light into P polarized light; p polarized light enters the 1 / 2 wave plate through the first PBS prism, and enters the beam splitter prism after the polarization direction is adjusted by the 1 / 2 wave plate; the upper half part and the lower half part of the beam splitter prism reflect the P polarized light with the adjusted polarization direction for multiple times and then output the P polarized light from the same light emitting surface; and the detector detects the positions of light output by the upper half part and the lower half part, and the optical system to be detected is leveled according to the positions.

Description

technical field [0001] The present disclosure relates to the technical field of integration and adjustment of an optical system, and in particular to a detection device and method for focusing and leveling an optical system. Background technique [0002] In the process of optical system integration, tilting and not being in the best focal plane are common problems, because purely relying on mechanical structure positioning, there will inevitably be positioning errors such as tilting and not being in the best focal plane, and the position of the best focal plane is usually placed with a marker plate , detectors and other important system components. These positioning errors will lead to a decrease in the contrast of the spot image signal received on the detector, directly affecting the resolution of the system, and ultimately reducing the measurement accuracy. Therefore, the adjustment of the tilt and the best focal plane must be solved. [0003] Usually, the tilt adjustment...

AI Technical Summary

Problems solved by technology

[0005] In view of the above problems, the present disclosure provides a detection device and method for focusing and leveling an optical system, which is used to at least partially solve the technical problems of traditional devices such as complex structure, poor versatility, and high cost

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