Cobra probe insertion device and Cobra probe insertion method

Abstract

The invention discloses a Cobra probe inserting device and a Cobra probe inserting method. The pin inserting device comprises an upper fixing structure, a lower fixing structure, a first space displacement mechanism, a second space displacement mechanism, a positioning guide structure and a visual detection structure; the pin inserting device is configured in a way that when the lower cover plate where the probes are inserted is located at the second working position and the upper cover plate is located at the first initial position, upper probe holes in the upper cover plate are in one-to-one vertical correspondence with probe tails of the probes, and lower probe holes in the lower cover plate are in one-to-one correspondence with probe tails of the probes. And the guide holes in the upper cover plate are in one-to-one vertical correspondence with the guide columns on the lower fixing structure. By means of a mechanical structure which is simple in structure and extremely high in reliability and precision, it can be guaranteed that the upper cover plate and the lower cover plate are stable and separated without deviation before the Cobra probe is inserted, the problems of probe bending, repeated alignment, low efficiency and the like are solved, cost is low, precision is high, the insertion yield of the Cobra probe with a special structure is guaranteed, and applicability is wide.

Description

technical field [0001] The invention relates to the technical field of semiconductor chip testing, in particular to a Cobra probe pin device and a pin insertion method for high-end probe card production. Background technique [0002] The probe card is a tool used for chip testing. The number and spacing of probes in the probe card correspond to the number and spacing of pins on the chip. With the popularization of large-size and high-density chips, the requirements for probe card probes are getting higher and higher. In order to meet the test requirements, a probe card is made of Cobra probes, which can meet the chip test requirements. [0003] Reference is attached Figure 2A to the attached Figure 2C The schematic diagram of the structure of the Cobra probe is shown. The Cobra probe is characterized by a small size and a curved arc structure in the middle. The cross section of the structure is square (section 60μm*60μm), and the central axis of the probe tip does not c...

AI Technical Summary

Problems solved by technology

[0010] (1) When the tip of the Cobra probe penetrates into the probe hole on the lower cover of the probe card, the Cobra probe will have a certain inclination;

[0011] (2) When manually controlling the upper cover of the probe card to align with the Cobra probe needle tail, although the guide column has a certain Z-axis guiding effect, there is still a certain inclination, which cannot ensure that the upper cover of the probe card is aligned with the lower end of the probe card. The parallelism of the cover plate causes problems such as bent needles, repeated alignment, and low efficiency

Images