Capacitance film gauge, pressure measurement method, system, electronic device and storage medium
A measurement method and measurement system technology, which is applied in fluid pressure measurement using capacitance changes, measurement devices, and measurement of fluid pressure, etc., which can solve uneven deformation of diaphragms, inaccurate pressure values of measured gases, and installation and use of capacitance film gauges. Inconvenience and other problems to achieve the effect of improving convenience
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Embodiment 1
[0067] The number of the first measurement electrodes 4 is an even number, and step S2 includes the following sub-steps:
[0068] S21, performing differential processing on the second measurement capacitance information generated by each group of symmetrically arranged first measurement electrodes 4 to generate multiple first differential results;
[0069] S22. If all the first difference results are less than or equal to the preset uniform threshold, the diaphragm 1 is deformed uniformly, and the pressure value is calculated according to any second measurement capacitance information and the first measurement capacitance information;
[0070] S23. If any of the first differential results is greater than the uniform threshold, the diaphragm 1 is not uniformly deformed, calculate the first average capacitance value according to the two second measured capacitance information corresponding to the largest first differential result, and calculate the first average capacitance accordi...
Embodiment 2
[0075] The number of the first measurement electrodes 4 is an even number, and step S2 includes the following sub-steps:
[0076] S21', performing differential processing on the second measurement capacitance information generated by each group of symmetrically arranged first measurement electrodes 4 to generate multiple second differential results;
[0077] S22': If all the second difference results are less than or equal to the preset uniform threshold, the diaphragm 1 is deformed uniformly, and the second average capacitance value is calculated according to the two second measured capacitance information corresponding to the smallest second difference result, and the second average capacitance value is calculated according to the first 2. Calculate the pressure value from the average capacitance value and the first measured capacitance information;
[0078] S23', if any second difference result is greater than the uniform threshold, the diaphragm 1 is not uniformly deformed...
Embodiment 3
[0082] The pressure measurement system also includes a plurality of second measurement electrodes 5, and the plurality of second measurement electrodes 5 are arranged in a circumferential array outside the first measurement electrodes 4, and the number of the second measurement electrodes 5 is the same as the number of the first measurement electrodes 4, And the first measurement electrodes 4 are staggered, and a plurality of second measurement electrodes 5 are used to generate corresponding third measurement capacitance information according to their distances from the diaphragm 1. The number of the first measurement electrodes 4 and the second measurement electrodes 5 are equal to each other. is an even number, step S2 includes the following sub-steps:
[0083] S21 ″, performing differential processing on the second measurement capacitance information generated by each group of symmetrically arranged first measurement electrodes 4 to generate a plurality of third differential...
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