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Molecular pump

A technology for molecular pumps and pump casings, which is applied to pumps, axial flow pumps, pump components, etc., can solve problems affecting compression ratio, etc., and achieve the effects of avoiding misalignment, improving the fixing effect, and facilitating assembly

Pending Publication Date: 2022-06-07
KYKY TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] Therefore, the technical problem to be solved by the present invention is to overcome the defect that the gas in the molecular pump in the prior art is easy to flow back from the gap between the pump casing and the spacer ring and affect the compression ratio, thereby providing a molecular pump

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  • Molecular pump
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Embodiment Construction

[0036] The technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are a part of the embodiments of the present invention, but not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

[0037] In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. The indicated orientation or positional relationship is based on the orientation or positional relationship shown in the accompanying drawings, and is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the indicated device or element must have ...

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Abstract

The invention provides a molecular pump and belongs to the technical field of pump bodies, the molecular pump comprises a base, a pump shell, a driving shaft, static pieces and an isolating ring, the pump shell covers the base, the pump shell is provided with a mounting cavity used for containing the movable pieces and the static pieces, the driving shaft is rotatably connected to the base, the multiple movable pieces are arranged on the driving shaft at intervals in the axial direction, and the isolating ring is arranged on the base. The static pieces are arranged between every two adjacent movable pieces, the multiple isolating rings are axially pressed in the mounting cavity of the pump shell so as to be used for clamping and fixing the static pieces, every two adjacent isolating rings are connected in a sealed mode through a first sealing piece, and one isolating ring is provided with a flow guide channel used for communicating the inner side and the outer side of the isolating ring. According to the molecular pump provided by the invention, gas can be prevented from flowing back from the gap between the isolating ring and the pump shell, so that the limit compression ratio of the molecular pump can be increased.

Description

technical field [0001] The invention relates to the technical field of pump bodies, in particular to a molecular pump. Background technique [0002] With the vigorous development of molecular pumps in semiconductor, industrial coating and other industries, the application of molecular pumps is becoming more and more common. [0003] The specific working principle of the molecular pump is as follows: the gas enters through the inlet of the molecular pump, moves downward under the driving of the moving plate and the static plate of the molecular pump, is pulled by the traction stage, and finally is discharged through the front stage port. The venting capability creates a very large pressure differential between the gas inlet and outlet. [0004] The static plate of the molecular pump in the prior art is pressed and fixed by the isolation ring. After the pump casing is assembled, the isolation ring is pressed to prevent the static plate from loosening. However, due to the asse...

Claims

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Application Information

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IPC IPC(8): F04D19/04F04D29/08F04D29/64
CPCF04D19/042F04D29/083F04D29/644
Inventor 蒋国安许鹏李赏
Owner KYKY TECH