Capacitive acceleration sensor

An acceleration sensor, capacitive technology, applied in the sensor field, can solve the problems of system reliability impact, plate adhesion failure, etc., and achieve the effect of avoiding adhesion failure

Pending Publication Date: 2022-07-08
MEMSENSING MICROSYST SUZHOU CHINA
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, this structure is prone to plate adhesion failure, which affects the reliability of the system

Method used

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Embodiment Construction

[0041] In order to make the purposes, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be described clearly and completely below. Obviously, the described embodiments are part of the embodiments of the present invention, but not all of them. example. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention. Unless otherwise defined, technical or scientific terms used herein should have the ordinary meaning as understood by one of ordinary skill in the art to which this invention belongs. As used herein, "comprising" and similar words mean that the elements or things appearing before the word encompass the elements or things recited after the word and their equivalents, but do not exclude other elements or things.

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Abstract

The invention provides a capacitive acceleration sensor. The capacitive acceleration sensor comprises a substrate, an anchoring part, a mass block and a torsion part, the substrate is provided with a backstop structure, the mass block comprises a limiting structure arranged corresponding to the backstop structure, and the limiting structure and the backstop structure generate elastic deformation after interacting with each other, so that in the process that any end part of the mass block moves towards or away from the substrate, the elastic deformation is generated; elastic deformation generated after interaction of the limiting structure and the stop structure plays a buffering role, and adhesion failure is effectively avoided.

Description

technical field [0001] The present invention relates to the technical field of sensors, in particular to a capacitive acceleration sensor. Background technique [0002] The z-axis capacitive acceleration sensor is realized by a rocker structure, and asymmetric mass blocks are respectively set on both sides of the rocker. When there is no external signal, the moving pole plate and the fixed pole plate are relatively static, and there is no capacitance change on both sides of the rocker. When an acceleration signal is applied to the z direction, the moving pole plate is twisted, and the moving pole plate on both sides of the rocker plate is opposite to the fixed pole plate. The movement direction is opposite, at this time the capacitance on both sides of the rocker changes, and the displacement of the moving plate can be calculated according to the differential capacitance. However, this structure is prone to plate adhesion failure, which has an impact on the reliability of t...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01P15/125
CPCG01P15/125
Inventor 李诺伦庄瑞芬张沛陈嘉辉
Owner MEMSENSING MICROSYST SUZHOU CHINA
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