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Atomic force microscope

An atomic force microscope and microscope technology, applied in the field of microscopy, can solve the problems of increasing the complexity of the microscope, surface measurement deviation, complex evaluation, and high cost

Pending Publication Date: 2022-07-22
巴黎科学与文学基金会 +3
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0009] However, such probes have the following disadvantages: they are expensive and fragile
[0011] However, the evaluation of surfaces in contact with elements other than air, such as vacuum or liquid media, can be complicated
In fact, the probe must be introduced at least partially into this medium, which increases the complexity of the design of the microscope and / or leads to measurement bias of the surface

Method used

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  • Atomic force microscope
  • Atomic force microscope
  • Atomic force microscope

Examples

Experimental program
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Effect test

Embodiment Construction

[0046] General Architecture of Microscope 1

[0047] refer to figure 1 and figure 2 , the atomic force microscope 1 includes a sample holder 3 . The sample holder 3 supports the sample 2 with the surface 9 to be measured. In particular, the sample holder 3 comprises at least two distinct regions: a first region 4 and a second region 7 . The first area 4 is adapted to receive the sample 2 fixedly mounted relative to the first area 4 . The microscope also includes a support 6 . The support 6 is fixedly mounted on the ground or on the reference frame of the measurement site. The second area 7 is fixedly mounted on the support. The second region 5 can only be made in one piece with the support 6 or welded to the support 6 .

[0048] The sample holder 3 is deformable so as to allow relative displacement of the first region 4 with respect to the second region 7 . The portion of the sample holder 3 comprised between the first region 4 and the second region 7 may preferably b...

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Abstract

The invention relates to an atomic force microscope for evaluating a surface of a sample, the atomic force microscope comprising: a sample holder having a first region for receiving a sample, the sample being mounted in a stationary manner; a probe having a tip positionable facing the surface of the sample, the microscope configured to allow a position of the tip to be adjusted relative to the surface; and a support, the sample holder having at least one second region, the second region being separate from the first region and being fixed relative to the support, the sample holder being deformable so as to allow movement of the first region relative to the second region, and the microscope comprising a detector capable of detecting movement of the first region relative to the second region.

Description

technical field [0001] The invention relates to a microscope, in particular to an atomic force microscope. Background technique [0002] Atomic force microscopy (AFM) allows the measurement of surface topography with a resolution in the nanometer range. In a known manner, the AFM comprises a probe comprising a tip adapted to be positioned facing the surface, eg in contact with the surface and a few hundred nanometers away from the surface. The interaction between the ends and the surface to be evaluated results in a change in the mechanical properties of the probe. This change is recorded to evaluate the surface, for example by measuring changes in the reflection of the laser beam on the probe or changes in the electrical properties of the piezoresistive material integrated into the probe. [0003] A number of methods have been developed to assess the properties of surfaces by means of probes. Of these, the most widely known are for example measuring in contact mode, non-...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01Q60/24G01Q10/04G01Q30/14
CPCG01Q60/24G01Q10/04G01Q30/14G01Q30/20
Inventor 安托万·尼格斯亚历山德罗·西里亚
Owner 巴黎科学与文学基金会