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Two-dimensional micro-motion platform for atomic force microscope and micro-mechanical parameter test method

An atomic force microscope, two-dimensional micro-motion technology, used in scanning probe microscopy, measuring devices, scientific instruments, etc., can solve problems such as limited application, only a few square microns, two-dimensional

Active Publication Date: 2009-01-07
SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

A more important problem is that the scanning area of ​​the atomic force microscope is usually only on the scale of a few square microns, such as the atomic force microscope of DI company, the scanning area of ​​the scanning tube PZT is about 5×5 square microns, and the observed surface is usually two-dimensional of
However, microstructure devices are generally tens, hundreds or even thousands of microns. Once the sample is placed on the test platform, the sample can only be moved manually to position the sample under the microprobe, which greatly limits its application Application of Microstructure Mechanics Testing
Japan's Seiko II, SPA 400 system has a micro-motion platform structure, which can move between millimeters and centimeters. It is characterized in that the mobile platform is placed on the probe, that is, when the micro-motion platform moves, the probe moves with it. This can have a large range of moving space, which is convenient and practical, but its corresponding system only includes conventional scanning testing and surface analysis, without corresponding mechanical testing analysis and automatic data extraction functions

Method used

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  • Two-dimensional micro-motion platform for atomic force microscope and micro-mechanical parameter test method

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Embodiment 1

[0033] Embodiment 1, the implementation of two-dimensional micro-mechanical platform

[0034] Two-dimensional micro-motion platform such as figure 1 and 2 As shown, it mainly includes a two-dimensional micro-motion platform 2 installed and fixed on the base, a PZT scanning tube is fixed in the center hole of the two-dimensional micro-motion platform 2 through epoxy glue, and the two-dimensional micro-motion platform is composed of two adjustment knobs ( figure 1 5) and ( figure 1 Middle 6) Control the driving screws perpendicular to each other. Both the two-dimensional micro-motion platform and the base are made of steel, and the PZT scanning tube 7 is fixedly installed on the two-dimensional micro-motion device, and the adjustment knobs 5 and 6 are connected to the driving rod, and the driving rod is fixed to the two-dimensional micro-moving platform and the PZT scanning tube Connect to move the position of the scan tube and corresponding sample. Then place the micro-move...

Embodiment 2

[0035] Embodiment 2, the test of the mechanical parameters of the cantilever beam under the three situations of fixed point, micro-zone point by point and continuous point:

[0036] The test is carried out in a clean room environment at room temperature, with a temperature of 25°C and a humidity of 40-60%. according to Figure 4 The program is tested, on the silicon (100) surface with a length of 100 μm, a width of 40 μm, and a thickness of 1.55 μm, the micro-cantilever structure prepared along the crystal direction is tested using a cantilever beam with an elastic coefficient k=16N / m ( Provided by the manufacturer), the elastic coefficient at the end of the cantilever beam to be measured is 6.2N / m. The Young's modulus E=165GPa of monocrystalline silicon is obtained by calculation, which is close to the currently recognized 169GPa. According to the theoretical calculation, by the formula k = 1 4 Ew ...

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Abstract

The invention relates to a 2D micro-positioning platform for an atomic force microscope and a measuring method of mechanical parameters. The 2D micro-positioning platform is characterized in that the center of the 2D micro-positioning platform is provided with a hole for equipping a PZT scanning tube, wherein an X position and a Y position perpendicular to each other are provided with two adjusting knobs respectively, the two adjusting knobs are connected with two drive rods which are connected with the PZT scanning tube, and the 2D micro-positioning platform is fixed on a base. The moving range of the 2D micro-positioning platform of the invention is 3*3 square mm in the horizontal direction; and the maximum scanning shift of the PZT scanning tube is 20Mum. By utilizing an AFM microscope with the improved 2D micro-positioning platform, the mechanical parameters of a fixed point on a microstructure can be tested, the mechanical-displacement function test of micro point-to-point and the continuous elastic coefficient test in a micro area can be carried out, and all the tests produce good consistency results.

Description

technical field [0001] The invention relates to a two-dimensional micro-movement platform for an atomic force microscope and a testing method for micro-mechanical parameters to detect and analyze the mechanical parameters of micro-structures produced by micro-processing, and belongs to the field of micro-mechanical testing and analysis. Background technique [0002] All kinds of tiny devices manufactured by MEMS are composed of basic structural units such as micro-cantilever beams and thin films. These tiny structural units can sense external vibrations, heat, etc. and transmit them as electrical or other forms of signals. go out. External effects such as vibration and heat will cause deformation of the microstructure, and the magnitude of the deformation determines the sensitivity and range of the device and other parameters. Therefore, in order to obtain the parameters required by the design, the manufacturing control process is very important. At the same time, the dete...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G12B21/22G01N13/16G01Q60/24
Inventor 鲍海飞李昕欣张波郭久福
Owner SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI
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