Array type ultrasonic sensor

Abstract

The embodiment of the invention provides an array type ultrasonic sensor. The array type ultrasonic sensor comprises a semiconductor substrate, a first sensing array and a second sensing array, the first sensing array comprises two or more than two first ultrasonic sensing units. Each first ultrasonic sensing unit comprises a first positive electrode and a first negative electrode, the first positive electrodes of the first ultrasonic sensing units are connected in series, and the first negative electrodes of the first ultrasonic sensing units are connected in series. The second sensing array comprises two or more than two second ultrasonic sensing units. Each second ultrasonic sensing unit comprises a second positive electrode and a second negative electrode, the second positive electrodes of the second ultrasonic sensing units are connected in series, and the second negative electrodes of the second ultrasonic sensing units are connected in series. One of the first sensing array and the second sensing array is used for emitting ultrasonic waves, and the other one is used for receiving reflected ultrasonic waves.

Description

technical field [0001] The present application relates to the field of sensing, and in particular, to an array ultrasonic sensor. Background technique [0002] Ultrasonic sensors usually use the design of a hollow cavity, and can effectively distinguish the emitted ultrasonic wave and the reflected ultrasonic wave through the transmission time and phase. Therefore, it is widely used in the identification of various physiological information. [0003] With the thinning of the electronic devices used together, the thinning of the ultrasonic sensor must be achieved by reducing the hollow cavity. However, as the cavity space is reduced, the ultrasonic sensor may receive reflected ultrasonic waves before the vibration of the ultrasonic sensor has stopped, which may cause errors in judgment. Although it can be accomplished by adding additional sensors, there are still problems such as too large reflection angle and too small sound pressure, which affect the sensitivity and sensi...

AI Technical Summary

Problems solved by technology

However, as the cavity space shrinks, the ultrasonic sensor may receive reflected ultrasonic waves before the vibration of the ultrasonic sensor stops, which may cause errors in judgment

Although it can be done by adding additional sensors, there are still problems such as too large reflection angle and too low sound pressure, which affect the sensitivity and sensing effect of ultrasonic sensors

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