Device and method for measuring emergent mode field of optical chip

Abstract

The invention provides an emergent mode field measuring device of an optical chip and a measuring method thereof, the emergent mode field measuring device comprises a to-be-measured optical chip, an amplifying lens assembly and a plane detector, the to-be-measured optical chip is provided with at least two optical waveguides, the emergent ends of the at least two optical waveguides are located on the same side and are spaced at a preset interval, and the plane detector is arranged on the amplifying lens assembly. The emergent light of the at least two optical waveguides is imaged and amplified by the amplification lens assembly and then enters the plane detector. According to the method, the chip waveguide spacing is used for calibration, and the size of the emergent light spot at the emergent end can be calculated according to the equal proportion relation, so that the problem that the amplification factor of the lens group is difficult to calculate is solved, the trouble caused by selecting other calibration objects is also avoided, and the emergent mode field of the optical chip is simply and accurately measured.

Description

technical field

[0001] The invention relates to the field of optical chips, in particular to an output mode field measurement device of an optical chip and a measurement method thereof. Background technique

[0002] Optical chip refers to a chip that uses light waves for information transmission or data operations with the help of optical waveguides, and integrates the modulation, transmission, and demodulation of optical signals and electrical signals in the same integrated optical medium. For the optical waveguide formed by the gradient index inside the wafer, the coupling loss between the optical waveguide and the optical fiber is mainly determined by the size of the light spot exiting from the end face of the waveguide. has important meaning.

[0003] The commonly used solution now generally uses a lens (group) with a plane detector to perform near-field imaging on the end face of the waveguide and then measure it. There are two specific implementations. The first one i...

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