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Air floatation supporting mechanism

A support mechanism and air flotation technology, which is applied in the direction of mechanical equipment, bearings, shafts and bearings, etc., can solve the problems that the cylinder occupies a large space, cannot meet the support requirements of the workpiece table, and the vertical bearing capacity of the cylinder rod of the cylinder is limited.

Pending Publication Date: 2022-08-05
BEIJING SEMICON EQUIP INST THE 45TH RES INST OF CETC
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the cylinder occupies a large space, and the vertical bearing capacity of the cylinder rod of the cylinder is limited, which cannot meet the support requirements of the workpiece table in the suspended state

Method used

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Embodiment Construction

[0028] The technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are a part of the embodiments of the present invention, but not all of the embodiments.

[0029] The components of the embodiments of the invention generally described and shown in the drawings herein may be arranged and designed in a variety of different configurations. Thus, the following detailed description of the embodiments of the invention provided in the accompanying drawings is not intended to limit the scope of the invention as claimed, but is merely representative of selected embodiments of the invention.

[0030] Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

[0031] In the description of the present invention, it should b...

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Abstract

The invention relates to the technical field of precision equipment, in particular to an air floatation supporting mechanism. The air floatation supporting mechanism comprises a cylinder body, an air floatation assembly and a driving piece, the cylinder body is connected below the workpiece table, the upper end of the air floatation assembly is slidably connected into the cylinder body, and the lower end face of the air floatation assembly faces the supporting face. The cylinder body can be communicated with an external cylinder body air source so as to convey air into the cylinder body and downwards push the air floatation assembly to be close to the supporting surface; the driving piece can drive the air floating assembly to move upwards to be away from the supporting face. In the using process, when the workpiece table needs to suspend, firstly, air is introduced into the air cylinder to push the air floating assembly to move downwards to make contact with the supporting face, then the temporary supporting structure is removed, the air floating assembly is started, and the air floating assembly blows air towards the supporting face to form a supporting air film; therefore, the air floatation supporting mechanism and the workpiece table float upwards and suspend above the supporting face, and in the suspension state, the cylinder body and the air floatation assembly can provide enough supporting force for the workpiece table.

Description

technical field [0001] The present application relates to the technical field of precision equipment, and in particular, to an air-floating support mechanism. Background technique [0002] For the precision workpiece table, an air-floating support structure is usually installed below the workpiece table, so that the workpiece table can be suspended above the supporting surface such as the ground, so as to avoid contact and friction with the supporting surface below during the movement of the workpiece table, thereby providing motion accuracy. In the existing air-floating support mechanism, the air-floating part is generally installed under the workpiece table through a jacking cylinder. When the air-floating part is not working, the workpiece table can be supported by other supporting structures, and the air-floating part can be supported by the cylinder. Lift off the support surface under the driving of the air flotation part to avoid damage to the lower surface of the air-...

Claims

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Application Information

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IPC IPC(8): F16C32/06F16C33/72
CPCF16C32/0614F16C32/0622F16C33/72
Inventor 杨师李海彬关宏武李龙飞
Owner BEIJING SEMICON EQUIP INST THE 45TH RES INST OF CETC
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