Remote mask layout inspecting method via network

Abstract

The remote mask layout inspecting method via network includes the following steps: storing the mask layout diagram in diagram reading computer with drawing software installed; logging on the client computer via the first network to network server with figure operation interface simulator based on network communication protocol installed; logging on the diagram reading computer via the network server and the second network; starting the drawing software with the figure operation interface simulator based on network communication protocol; and operating the drawing software to inspect the mask layout remotely in the browser of the client computer.

Description

technical field [0001] The invention relates to a method for inspecting a mask layout diagram, in particular to a method for remotely inspecting a mask layout diagram via the Internet. Background technique [0002] After the integrated circuit design company submits the designed circuit layout to the chip manufacturer for manufacturing, usually the chip manufacturer will execute the mask data map (Mask DataJobview) viewing program after the mask layout drawing is completed, that is, the mask The layout of the mask is sent to the IC design company for inspection to confirm the layout of the mask. After the confirmation is completed, the next step of mask making is carried out. In the aforementioned traditional program, if the customer does not have the drawing software for the mask layout, such as the CAD / CAM (computer-aided design and computer-aided manufacturing) software currently used by chip manufacturers, the chip manufacturer can only provide Some specific locations a...

AI Technical Summary

Problems solved by technology

In the aforementioned traditional program, if the customer does not have the drawing software for the mask layout, such as the CAD / CAM (computer-aided design and computer-aided manufacturing) software currently used by chip manufacturers, the chip manufacturer can only provide Some specific locations for customers to view these mask layout drawings, and both parties need to agree on the time and place of viewing the drawings

This is very inconvenient for customers and will consume a lot of time and manpower

[0003] The solution is for the customer to prepare the same CAD / CAM software as the chip manufacturer, then the chip manufacturer can transfer the file of the mask layout to the client's computer in FTP (File Transfer Protocol) mode to execute the drawing program, but As a result, customers have to spend money and time to maintain this CAD / CAM software

Regardless of whether you are looking at the above-mentioned specific location or directly on the client's computer, the mask design office needs to transfer the file of the mask layout to the specific location by FTP. This FTP transfer method will consume time for sending and downloading the file.

The above-mentioned traditional drawing program will affect the time of the whole integrated circuit manufacturing process

[0004] The above-mentioned traditional method has some disadvantages. The first is that it takes manpower and time to process, and the second is that the time of the entire integrated circuit manufacturing process increases, and the customer cannot check the mask layout at any time, and each time the drawing procedure needs to be agreed separately time, inconvenience to customers

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