Clad modulation wave guide type electro-optical modulator

An electro-optical modulator and modulated wave technology, applied in instruments, optics, optical demodulation, etc., can solve the problems of large birefringence of the core layer, waveguide propagation loss, etc., to reduce half-wave voltage, improve performance, low light The effect of transmission loss

Inactive Publication Date: 2003-10-22
HUAZHONG UNIV OF SCI & TECH
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  • Abstract
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Problems solved by technology

[0005] The present invention proposes a cladding-modulated waveguide-type electro-optic modulator, the purpo

Method used

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  • Clad modulation wave guide type electro-optical modulator
  • Clad modulation wave guide type electro-optical modulator
  • Clad modulation wave guide type electro-optical modulator

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Embodiment Construction

[0013] figure 2 Embodiment 1 of the present invention is given, image 3 Embodiment 2 of the present invention is given.

[0014] figure 2 The embodiment of the present invention is a Mach-Zehnder interferometer type cladding modulation polymer waveguide waveguide modulator, the cladding material is PMMA polymer doped with chromophore, has electro-optic activity, and the core layer is polyimide. Where (a) is a cross-sectional view of the waveguide, and (b) is a top view. When making, first clean Si or SiO 2 The Cr / Au electrode 7 is deposited on the substrate 1, which is called the substrate electrode or the lower electrode; then the lower cladding layer 2 is spin-coated and cured, and corona polarized; the waveguide core layer 3 is spin-coated on the lower cladding layer 2 and cured, Etching the pattern of the waveguide core layer; spin-coating the upper cladding layer 4 while curing and corona polarization; evaporating Cr / Au top electrode 6 and etching the electrode pat...

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Abstract

The invention is an clad modulating waveguide-type electrooptic modulator, resolving the problem about waveguide transmission loss and larger double refraction of the core layer. It is composed of the core layer and the clad, the former adopting nonlinear electrooptic material and the latter adopting non-electrooptic active material, makes the waveguide effective refraction index vary with the modulatio voltage through only making the waveguide clad adopt the lectrooptic material, and accordingly achieves the modulating purpose. It can increase the modulation frequency.

Description

technical field [0001] The invention belongs to the technical field of optical communication devices, in particular to optoelectronic devices such as waveguide electro-optical modulators. Background technique [0002] Waveguide electro-optic modulators mainly use electro-optic materials, such as LiNbO 3 Ferroelectric crystals, semiconductor materials, and polarized polymers are realized by generating electro-optic effects under the action of an electric field. When the modulation electric field acts, due to the electro-optic effect, the refractive index of the core layer or the equivalent refractive index of the waveguide changes with the modulation field, which causes the light propagation phase to also change with the modulation field to realize light modulation. [0003] At present, waveguide core layer modulation is adopted in the design of waveguide optical modulators, that is, the core layer is made of electro-optical materials. For related patents, refer to US2003 / 00...

Claims

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Application Information

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IPC IPC(8): G02F1/03G02F2/00
Inventor 朱大庆刘子龙
Owner HUAZHONG UNIV OF SCI & TECH
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