Laterally floating latch hub assembly
Patent Information
- Authority / Receiving Office
- CN · China
- Current Assignee / Owner
- ENTEGRIS CAYMAN
- Publication Date
- 2004-03-31
- Estimated Expiration
- Not applicable · inactive patent
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Abstract
Description
[0001] This application claims priority from US Provisional Application Serial No. 60 / 255,625, filed October 13, 2000, the disclosure of which is incorporated herein by reference. technical field
[0002] The present invention relates to front opening unitary containers, or FOUPs, and more particularly to laterally floating latch hub assemblies for use with FOUP doors or access doors to improve latch assembly tolerance for use with The drive latch key engages and minimizes FOUP errors at the channel. Background technique
[0003] US Patents US4532970 and US4534389 disclose the SMIF system proposed by Hewlett-Packard Company. The purpose of the SMIF system is to reduce the flux of particles on semiconductor wafers during wafer storage and transportation in the semiconductor manufacturing process. This purpose is accomplished in part mechanically to ensure that the gaseous medium (such as air or nitrogen) surrounding the wafer is substantially stable with respect to the wafer...