Laterally floating latch hub assembly

A lock and component technology, applied to building locks, connecting components, electrical components, etc.

Inactive Publication Date: 2004-03-31
ENTEGRIS CAYMAN
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Prior art attempts to solve this problem, including the slanting of

Method used

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  • Laterally floating latch hub assembly
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  • Laterally floating latch hub assembly

Examples

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Embodiment Construction

[0040]The present invention will be described in detail with reference to Figures 1-15, wherein the preferred embodiment relates to a FOUP door which includes a laterally floating snap lock cylinder assembly. In a preferred embodiment, laterally floating snap lock cylinder assemblies are combined with other conventional snap lock cylinder assemblies for use in a FOUP with or without a FOUP door.

[0041] Referring now to FIG. 1 , there is shown a perspective view of a 300mm FOUP 20 including a FOUP door 22 mated to a FOUP housing 24 so that one or more workpieces located therein form a closed environment. (When the FOUP is on the aisle, the rear of the container door 20 generally faces the aisle door. For clarity, it is shown otherwise in FIG. 1.) When the container door 20 is a 300mm FOUP, the size and type of container does not The invention is not limited. To transfer workpieces between FOUP 20 and process tool 29 (FIG. 2A), the FOUP is loaded at load port 25 adjacent acce...

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Abstract

A laterally floating latch hub assembly includes a latch key receptor translatably mounted within a rotatable latch actuation cam. Latch keys within a port door are received within the latch key receptor, which is capable of translating laterally to ensure a proper fit of the latch key within the receptor. Once received within the receptor, torque from the latch keys is transmitted to the latch actuation cam via the latch key receptor.

Description

[0001] This application claims priority from US Provisional Application Serial No. 60 / 255,625, filed October 13, 2000, the disclosure of which is incorporated herein by reference. technical field [0002] The present invention relates to front opening unitary containers, or FOUPs, and more particularly to laterally floating latch hub assemblies for use with FOUP doors or access doors to improve latch assembly tolerance for use with The drive latch key engages and minimizes FOUP errors at the channel. Background technique [0003] US Patents US4532970 and US4534389 disclose the SMIF system proposed by Hewlett-Packard Company. The purpose of the SMIF system is to reduce the flux of particles on semiconductor wafers during wafer storage and transportation in the semiconductor manufacturing process. This purpose is accomplished in part mechanically to ensure that the gaseous medium (such as air or nitrogen) surrounding the wafer is substantially stable with respect to the wafer...

Claims

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Application Information

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IPC IPC(8): B65D85/86E05B17/00E05B65/00E05C9/04H01L21/673H01L21/677
CPCE05B17/0025E05C9/047H01L21/67373E05B65/006Y10S292/62H01L21/67763E05C9/04Y10T292/522Y10T70/7706E05C1/06
Inventor 安东尼·C·博诺拉
Owner ENTEGRIS CAYMAN
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