Sliding slot heat treatment device

A heat treatment device and heat treatment chamber technology, applied in lighting and heating equipment, furnace components, furnace types, etc., can solve the problems of high heat treatment device height and hot gas leakage.
CN1517312AInactive Publication Date: 2004-08-04ESPEC CORP
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Patent Information

Authority / Receiving Office
CN Β· China
Patent Type
Applications(China)
Current Assignee / Owner
ESPEC CORP
Publication Date
2004-08-04
Estimated Expiration
Not applicable Β· inactive patent

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Abstract

A thermal treatment unit 1 is a device for carrying out a thermal treatment of a works W by supporting the works W on supporting frames of the unit 1 to multi-stages as 31 stages and taking in and out the works w. The unit comprises an isolating plate 4 fitted with 6 slits 41 of 411 to 416, small doors 5 divided in 6 pieces of 51 to 56 to open and close the slits, an up and down device 6 for the plate 4, an open and close device 7 for the small doors 5, etc. The work W is put in and out without leakage of hot air in a thermal treatment room 2 by opening, for example, only the door 56 maintaining the other small doors closed when putting in and out the work W through the slit 46. A height of the unit is kept low as the plate 4 moves vertically only the distance corresponding to 5 stages of the works.
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Description

technical field

[0001] The present invention relates to a sliding slit type that supports multi-layer plate-like objects to be processed on a support device provided in a heat treatment chamber, and takes and places the objects to be processed one by one from the opening of the heat treatment chamber for heat treatment. Heat treatment device. Background technique

[0002] As a heat treatment device generally called a purification furnace, which supports flat workpieces such as multi-layer LCD glass substrates in a heat treatment chamber, and takes them one by one for heat treatment, the structure that is generally used in the past is to install workpieces at a certain position. The slit-shaped opening of the machine is loaded with multi-layer workpieces at certain intervals on a loading device called a gondola (condola), which can be lifted. The lifting gondola aligns the position of the workpiece after heat treatment with the opening, and then picks and places it with a man...

Claims

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