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Method for manufacturing resonant device

一种制造方法、器件的技术，应用在压电/电致伸缩器件的制造/组装、压电器件/电致伸缩器件、仪器等方向，能够解决加工、很难、很难正确测定共振频率等问题

Inactive Publication Date: 2005-03-16
PANASONIC CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] As indicators for making them into predetermined values, in the processing of structures, only the shape or size of the width and thickness of the arms of the structure can be accurately measured, and it is difficult to accurately measure the actual resonance frequency
Therefore, in the above method, it is difficult to use the detuning frequency as an index to process the structure

Method used

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  • Method for manufacturing resonant device
  • Method for manufacturing resonant device
  • Method for manufacturing resonant device

Examples

Experimental program
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Embodiment Construction

[0024] (implementation form 1)

[0025] FIG. 1 is a perspective view of an angular velocity sensor as a resonance device according to an embodiment of the present invention. This sensor is equipped with a tuning fork-shaped structure 1 made of silicon, a lower electrode 2 made of platinum placed on the upper surface of the structure 1, and a driving piezoelectric body made of lead zirconate titanate placed on the upper surface of the lower electrode 2. 3A and the detection piezoelectric body 3B, the drive electrode 4A provided on the upper surface of the drive piezoelectric body 3A, and the detection electrode 4B described above are provided on the detection piezoelectric body 3B. The lower electrode 2 and the upper electrode 4 are connected to the outside through wiring and electrode pads 6 provided on the base 7 of the structure 1 .

[0026] Next, the operation of such an angular velocity sensor will be described with reference to FIG. 1 . The upper electrode 4 is divided ...

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Abstract

A piezoelectric member and an electrode are formed over a silicon substrate. The piezoelectric member and the electrode are patterned by photolithography. The silicon substrate is etched to form a body. A protective film is formed on at least one surface of the body. Another surface having no protective film thereon is etched to obtain a resonant device. The body is etched in its thickness direction accurately while a resonance frequency of the body is measured. The manufacturing processes allow the resonance frequency and a gap frequency of the resonant device to be adjusted to predetermined values.

Description

technical field [0001] The present invention relates to a method of manufacturing a resonance device used in an acceleration sensor, an angular velocity sensor, a resonator, a filter, etc., utilizing the mechanical resonance phenomenon of an object. Background technique [0002] The prior art angular velocity sensor described in U.S. Patent No. 5,438,231 as a resonant device is equipped with a tuning-fork-shaped structure made of non-piezoelectric materials such as silicon, and the lower electrode formed on the structure is formed on the lower The piezoelectric body on the electrodes is a plurality of upper electrodes formed on the piezoelectric body, and when a voltage is applied between the lower electrode and the upper electrode, the tuning fork-like structure vibrates. When the structure is given an angular velocity from the outside in a vibration state, it will be displaced in a direction perpendicular to the vibration direction due to the Creole force. By this displac...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01C19/56G01C19/5628H01L41/08H01L41/22H01L41/23H01L41/332H03H3/02H03H9/21
CPCG01C19/5621G01C19/5628H03H2003/026H03H9/21
Inventor 中谷将也多鹿博文
Owner PANASONIC CORP