Base plate transfer device

Abstract

The base plate transfer device includes one pedestal; one rotation shaft unit with one support shaft and one rotation shaft seat fixed on the pedestal and pivoted with the support shaft to support the support shaft and control the rotation of the support shaft; and one base plate bearing unit fixed to the other end of the support shaft and including one bearing base connected to the support shaft, several bearing elements on the surface of the bearing base, one top bearing base on one side of the bearing elements and at least one telescopic element. The top bearing base has several vacuum sucking nozzles for sucking and detecting the base plate; the telescopic element is for regulating the interval between the top bearing base and the bearing base; and the rotation shaft seat controls the inclination of the base plate bearing unit indirectly. The present invention can detect the fault in base plate, correct the position of the base plate and convey base plate in inclined mode.

Description

【Technical field】 [0001] The invention relates to a substrate conveying device, in particular to a substrate conveying device suitable for large-size glass substrates. 【Background technique】 [0002] In the manufacturing process of liquid crystal display, its glass substrate needs to be transported through the conveying system between the place where the substrate is placed and the process machine, such as Figure 1a Shown is a conventional support frame fork (fork) and mechanical arm (robot) system. In recent years, in order to reduce the production cost of liquid crystal displays, the size of the glass substrate must be enlarged for the most effective and economical cutting. Therefore, the size of the glass substrate of the fifth-generation factory has already exceeded 2 meters. Furthermore, in order to cope with the large glass substrate, the way the glass substrate enters the processing tool has also changed. Most of the traditional glass substrates enter the machine in...

AI Technical Summary

Problems solved by technology

[0003] (1) The edge defects of the glass substrate cannot be detected: such as Figure 1b As shown, since the area of ​​the supporting frame fork 100 is small, it cannot cover the edge of the enlarged glass substrate 200, so the crack defect 210 of the glass substrate cannot be effectively detected.

Moreover, such defects are usually particularly prone to appear on the edge of the glass substrate. If such a defective glass substrate is sent into the process machine, once it is broken, a large number of glass fragments will cause the machine to stop, delay production, and even worse. Can cause irreparable damage to the machine

[0004] (2) It is difficult to feed the glass substrate of the inclined loader (loader), and it is easy to cause fragments: because the conventional support fork has no functions such as positioning and posture correction for the glass substrate, it is usually installed on the loader of the machine. Auxiliary correction mechanism, this problem is easy to solve for small-sized substrates and horizontal loaders, but for large-scale glass substrates, the original small dimensional deviation in one place will become a large dimensional deviation when it accumulates in another place

On the other hand, due to the narrow space at the entrance of the loader with a tilting machine, even if there is a table correction mechanism, its effect is very limited, and it is easy to cause fragments

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