Apparatus for manufacturing flat-panel display
A flat-panel display and manufacturing device technology, which can be applied to simulation devices of space navigation conditions, semiconductor/solid-state device manufacturing, instruments, etc., can solve the problems of increased time and area of transmission substrates
Inactive Publication Date: 2005-08-31
ADVANCED DISPLAY PROCESS ENG CO LTD
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Problems solved by technology
[0008] Recently, this problem has become more serious due to the increase in the time taken to transfer the substrate inevitably caused by the recent trend of increasing FPD size.
In addition, when the FPD manufacturing device is suitable for manufacturing large-sized FPDs, it is necessary to improve the substrate processing efficiency of the FPD manufacturing device because of the inevitable increase in the area of the FPD manufacturing device in the clean room
For this reason, the above-mentioned problem becomes more serious
Method used
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no. 3 approach
[0094] According to the third embodiment, the load lock chamber 710 includes a middle wall W, a top cover 711 a , a bottom cover 711 b , gate valves 721 a and 721 b , and a cover opening / closing member 713 .
[0095] An intermediate wall W is horizontally disposed at a central portion of the load lock chamber 710 to partition the interior of the load lock chamber 710 into an upper chamber portion 710a and a lower chamber portion 710b. Thus, the upper chamber portion 710a and the lower chamber portion 710b of the load lock chamber 710 isolated from each other by the intermediate wall W can be operated independently of each other.
[0096] As described above, when the load lock chamber 710 is partitioned into the upper chamber portion 710a and the lower chamber portion 710b, substrate loading and unloading can be performed independently for each chamber portion 710a and 710b, thereby achieving an increase in substrate loading / unloading efficiency. enhanced.
[0097] A top cover...
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A flat-panel display (FPD) manufacturing apparatus is disclosed which not only includes a load lock chamber, a feeding chamber, and a processing chamber, at least one of which has a vertically-stacked chamber structure to achieve an enhancement in substrate processing efficiency, but also includes a temporary substrate storing space for temporarily storing substrates in the feeding chamber to reduce the time taken to feed substrates. Another FPD manufacturing apparatus is disclosed which includes a load lock chamber, a feeding chamber connected to the load lock chamber, a temporary substrate storing space arranged at a predetermined portion of the feeding chamber, and at least one processing chamber connected to the feeding chamber.
Description
technical field [0001] The present invention relates to an apparatus for manufacturing a flat panel display (FPD), in particular, the apparatus for manufacturing an FPD to which the present invention relates not only includes a load lock chamber, a feed chamber and a processing chamber, at least one of which has a vertically stacked chamber structure To obtain enhanced substrate processing efficiency, a temporary substrate storage space for temporarily storing substrates in the feed chamber is also included to reduce the time required for substrate feeding. technical background [0002] refer to figure 1 , showing a common flat panel display (FPD) manufacturing device. The FPD manufacturing apparatus includes a load lock chamber 10, a feed chamber 20, and a process chamber 30, which are sequentially connected to process a substrate for the FPD. [0003] The load lock chamber 10 is connected to an external station to accommodate substrates to be processed in the FPD manufac...
Claims
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IPC IPC(8): C23C16/00G09B9/00H01L21/00
CPCH01L21/67236H01L21/67196H01L21/67201
Inventor 李荣钟崔浚泳曹生贤安成一
Owner ADVANCED DISPLAY PROCESS ENG CO LTD