Oscillating shower transfer type substrate treatment device

A substrate processing device and spray-type technology, which are applied in the directions of optics, instruments, electrical components, etc., can solve the problems of inability to eliminate, remain, and poor wettability of the glass substrate 4, and achieve the effect of eliminating shortcomings.
CN1684235AInactive Publication Date: 2005-10-19SUMITOMO PRECISION PROD CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
SUMITOMO PRECISION PROD CO LTD
Publication Date
2005-10-19
Estimated Expiration
Not applicable · inactive patent

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Abstract

This case is to provide a moving substrate processing device which can efficiently remove bubbles that are produced on a surface of processing liquid that is supplied to the surface and which can solve non-uniform processing rate in width direction which is key point of large substrate. The processing liquid is supplied, m horizontal direction, to a plurality of spray nozzle 34a of a substrate 100 entire surface so as to shake at both sides in a moving direction toward the substrate 100. A liquid flow from one side portion to another side portion and a liquid flow from one side portion to another side portion can form interactively.
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Description

[0001] This application is a divisional application of Chinese Invention Patent Application No. 01804736.X. technical field

[0002] The present invention relates to a conveyor-type substrate processing apparatus used in the manufacture of glass substrates for liquid crystal display devices and the like. Background technique

[0003] A glass substrate used in a liquid crystal display device is manufactured by repeatedly performing chemical treatments such as etching and peeling on the surface of a glass substrate as a base material. The processing equipment is roughly divided into dry type and wet type; wet type is further divided into batch type and blade type; blade type is further divided into rotary type and transfer type based on roller transfer, etc.

[0004] Among these substrate processing apparatuses, the transfer type apparatus has a basic structure of supplying a processing liquid to the surface of the substrate while conveying the substrate in the horizontal dire...

Claims

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