Cleansing method and cleansing liquid supplying device therefor
Patent Information
- Authority / Receiving Office
- CN · China
- Current Assignee / Owner
- XEVIOS CORP
- Publication Date
- 2006-03-15
- Estimated Expiration
- Not applicable · inactive patent
Smart Images
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Abstract
Description
technical field
[0001] The present invention relates to cleaning methods used in manufacturing steps of liquid crystal panel manufacturing, PDP panel manufacturing, organic EL panel manufacturing, FED panel manufacturing, printed circuit board manufacturing, semiconductor manufacturing, film manufacturing, plate manufacturing, and other electronic equipment parts. Implement the cleaning liquid supply device of this method, more specifically, the present invention relates to following cleaning method and the cleaning liquid supply device that implements this method, it is characterized in that to the object to be cleaned while spraying high-pressure cleaning liquid continuously The cleaning liquid is strengthened and weakened, and while continuously spraying high-pressure cleaning liquid to the object to be cleaned, the cleaning liquid that has been strengthened and weakened is sprayed to the object in parallel with the continuous spraying of the cleaning liquid. Cleaning. Ba...