Optical deflection element and optical switch
A technology of optical deflector and optical converter, which is applied in the direction of optical components, optical waveguide, light guide, light guide, etc., and can solve the problem of low deflection angle accuracy
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[0029] In this embodiment, a specific structure of a light deflection element employing the present invention will be described.
[0030] Figure 1A to Figure 1C shows the main components of the light deflecting element according to the first embodiment, wherein, Figure 1A is a top view diagram, Figure 1B is along Figure 1A The cross-sectional schematic diagram of the dotted line I-I, Figure 1C is along Figure 1A The schematic cross-section of the dotted line II-II in . In addition, FIGS. 2A to 2G and FIGS. 3A to 3E are schematic cross-sectional views showing the manufacturing method of the light deflection element according to the first embodiment in the order of steps (corresponding to the Figure 1A The cross-sectional schematic diagram of the dotted line I-I in).
[0031] Such as Figure 1A with Figure 1BAs shown, the light deflection element 10 of this embodiment is shaped to include: an optical waveguide 3 made of an electro-optic material on the element sub...
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