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Capacitor-style microfluid angular accelerometer

An angular accelerometer and microfluidic technology, applied in the direction of measurement of acceleration, velocity/acceleration/shock measurement, measurement device, etc., can solve the problems of increasing structural complexity and manufacturing cost, and improve the frequency response range and the applicable ambient temperature range. , improve performance, promote the effect of application scope

Inactive Publication Date: 2006-08-16
SHANGHAI JIAO TONG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In addition, the discrete capacitor plate leads will increase the complexity of the structure and the production cost

Method used

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  • Capacitor-style microfluid angular accelerometer
  • Capacitor-style microfluid angular accelerometer
  • Capacitor-style microfluid angular accelerometer

Examples

Experimental program
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Embodiment Construction

[0015] Such as figure 1 As shown, the present invention includes: an upper casing 1 , a fluid chamber 2 , a differential capacitance dynamic plate 3 , a differential capacitance fixed plate 4 , and a lower casing 5 . The upper shell 1 and the lower shell 5 are fixedly connected together by bonding materials, wherein the fluid chamber 2 is surrounded by the inner ring wall 6 of the chamber, the outer ring wall 7 of the chamber and the baffle plate 10, and the differential capacitive plate 3 passes through The outer ring wall 7 of the chamber is connected to the lower casing 5 , the differential capacitor fixed plate 4 and the lower casing 5 are fixedly connected together, and the fluid chamber 2 is filled with high-density fluid.

[0016] Such as figure 2 , image 3 As shown, on the lower shell 5, there are differential capacitive plates 3, chamber inner ring wall 6, chamber outer ring wall 7, П-shaped fixed plate 8, L-shaped fixed plate 9, baffle plate 10, rigid cavity The...

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PUM

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Abstract

A microfluid angular accelerometer of capacity type consists of top and bottom shell, fluid chamber, active and static counter electrode. It is featured as charging heavy density liquid full in said chamber, generating incline of baffle under inertia force action of sealing liquid when angular accelerometer is existed at vertical direction for driving differential capacity active counter electrode to move by flexible chamber external wall, detecting variation of differential capacity by control circuit then deriving out angular acceleration value inputted from outside .Its preparing process also disclosed.

Description

technical field [0001] The invention relates to a device in the technical field of microelectromechanical systems, in particular to a capacitive microfluidic angular accelerometer. Background technique [0002] Accelerometers are commonly used to measure the second derivative of displacement with respect to time. The angular accelerometer measures the second derivative of angular displacement with respect to time, and it can be used in automotive safety control systems, hard disk anti-shock vibration and other fields. When the carrier has an angular acceleration input in a certain direction, the angular accelerometer can output an electrical signal (such as voltage) proportional to the input angular acceleration through the detection circuit. For example, the sensed angular acceleration signal can be used to judge whether the car is about to tip over, so as to take corresponding measures in time. The angular accelerometer can also be used to control the read-write head of ...

Claims

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Application Information

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IPC IPC(8): G01P15/125
Inventor 吴校生陈文元赵小林张卫平
Owner SHANGHAI JIAO TONG UNIV