Light waveguide with composite structure for integrating optical sensor
A composite structure and integrated optics technology, which is applied in the field of integrated optics and light sensing, can solve the problems of low sensor sensitivity and weak interaction, and achieve the effects of enhanced interaction, large process tolerance, and improved sensitivity
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[0023] Such as figure 2 As shown, the optical waveguide of the present invention has a four-layer structure, including the lower cladding layer 1 and the core layer 2 of the pre-formed strip optical waveguide, the sensing film 3 above the core layer 2, and the sensing film 3 above the sensing film 3. Medium 4 containing the substance to be measured; the refractive index of the sensing film 3 is equal to or higher than the refractive index of the strip-shaped core layer 2 formed in advance, and the refractive index of the medium 4 containing the substance to be measured above the sensing film 3 is lower than that of the sensing film 3 The refractive index of the sensitive film 3; the refractive index of the lower cladding layer 1 of the pre-formed strip optical waveguide is lower than the refractive index of the core layer 2; forming an "inverted ridge" composite optical waveguide.
[0024] Since the structure of the composite optical waveguide has the above characteristics, s...
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