Acceleration sensor and magnetic disk device using the same
A technology of acceleration sensor and magnetic disk device, which is applied in acceleration measurement using inertial force, manufacturing/assembly of piezoelectric/electrostrictive device, piezoelectric device/electrostrictive device, etc. lowering etc.
Inactive Publication Date: 2007-01-10
KYOCERA CORP
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Problems solved by technology
[0010] Therefore, in order to improve the detection sensitivity of the acceleration of the acceleration sensor, it is necessary to increase the length L of the free vibration region of the vibration element and reduce the width W and thickness T of the vibration element, but the increase of the length L of the free vibration region of the vibration element will cause The increase in the size of the acceleration sensor, the reduction in the width and thickness T of the vibration element will lead to a reduction in mechanical strength and a reduction in reliability.
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manufacture example
[0146] Next, a manufacturing example of the acceleration sensor of the present invention will be described.
[0147] First, a binder was added to the raw material powder of lead zirconate titanate, pressed, and fired at a peak temperature of 1200° C. for 24 hours to obtain a piezoelectric body.
[0148] Then, the block is cut with a wire saw, and both sides are ground with a lapping machine to produce a piezoelectric mother substrate that becomes a piezoelectric substrate after being divided. The thickness of the piezoelectric mother substrate was set to be 100 μm.
[0149] Next, metal thin films divided to become conductor films 26 to 29 were formed on both main surfaces of the piezoelectric mother substrate by using a sputtering apparatus. Each metal thin film has a two-layer structure of chromium and silver, and after forming a chromium thin film with a thickness of 0.3 μm, a silver thin film is formed thereon with a thickness of 0.3 μm.
[0150] Next, the piezoelectric m...
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An acceleration sensor comprises a vibrating element formed by arranging conductor films on outer main surfaces of piezoelectric substrates in a rectangular parallelepiped shape, and first supportingmembers for holding a part of the vibrating element, the first supporting members being composed of an elastic body, and a bending point of the vibrating element being positioned within a supporting region held between the first supporting members. This causes a region, which is distorted, in each of the piezoelectric substrates to be enlarged. Therefore, the amount of charges to be generated is increased so that an output voltage is increased, which allows acceleration detection sensitivity to be further enhanced.
Description
technical field [0001] The present invention relates to an acceleration sensor using a piezoelectric substrate, and more particularly to a compact and highly sensitive acceleration sensor. Background technique [0002] Conventionally, acceleration sensors have been used for purposes such as detecting external shocks applied to electronic devices such as hard disk drives. [0003] For example, there is known an acceleration sensor of the type in which charge detection electrodes are arranged on both main surfaces of a rectangular parallelepiped piezoelectric substrate to form a vibrating element, and its ends are supported by supporting members (for example, refer to JP-A 2000- Publication No. 321299, Shi Kaiping No. 7-36064). [0004] In such an acceleration sensor, the vibrating element is deflected by the applied acceleration, thereby generating strain in the piezoelectric substrate, and charges are generated in the charge detection electrodes formed on both main surfaces...
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IPC IPC(8): G01P15/09G01P15/08H01L41/08H01L41/187H01L41/22H01L41/257H01L41/313H01L41/333
Inventor 桑畑道彦
Owner KYOCERA CORP