Unlock instant, AI-driven research and patent intelligence for your innovation.

Silicon particle, silicon particle superlattice and method for production thereof

A technology of silicon particles and superlattice, applied in the field of high-purity silicon particles and their preparation, can solve the problems of reduced product yield, increased cost, deviation of particle size, etc., and achieves the effect of high practicability and high productivity

Inactive Publication Date: 2012-03-07
DENKA CO LTD
View PDF8 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0011] However, the method of (a) above is mostly carried out in a high-temperature vacuum or a plasma atmosphere, so a highly controlled vacuum heating device or a plasma generator is required, and the cost increases.
In addition, although the method of (b) does not require expensive equipment like the method of (a), the product yield is significantly reduced
Regarding the methods (c) and (d), the particles are arranged on porous partitions or electrodes, but there is no suitable method for detaching films or shaped objects made of superlattices from these materials.
[0012] In addition, the particle size of the previous superlattice containing silicon particles produced by these methods has deviations, so the energy band structure or surface energy level is unstable, and when used as a light-emitting element, the luminous efficiency is not sufficiently improved. When electronic components are used, there are concerns about malfunctions, etc.

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Silicon particle, silicon particle superlattice and method for production thereof
  • Silicon particle, silicon particle superlattice and method for production thereof
  • Silicon particle, silicon particle superlattice and method for production thereof

Examples

Experimental program
Comparison scheme
Effect test

preparation example Construction

[0043]

[0044] The silicon particles of the present invention can be produced, for example, by heat-treating silicon oxide particles containing silicon particles synthesized in a vapor phase using monosilane gas and an oxidizing gas under a predetermined atmosphere and temperature, followed by removal of the silicon oxide.

[0045] Specifically, first, silicon oxide particles containing silicon particles are synthesized by reacting monosilane gas and oxidizing gas in a gas phase. The reaction can be carried out by introducing monosilane gas and oxidizing gas into the reaction vessel.

[0046] Among them, the raw material used as a silicon source in the present invention is monosilane gas. If silicon-containing gases other than monosilane gas are used, such as chlorosilicons (SiH n Cl 4-n , n is an integer of 0 to 3) as a raw material, the total amount of Na, Fe, Al, and Cl exceeds 10 ppm.

[0047] The oxidizing gas is not particularly limited as long as it can oxidize mo...

Embodiment 1

[0072] Introduce monosilane at a rate of 0.16 L / min, 0.4 L / min, and 17.5 L / min into a reaction vessel composed of a quartz glass reaction tube (inner diameter 50 mm, length 1000 mm) maintained at a temperature of 700°C and a pressure of 90 kPa. gas, oxygen and nitrogen for dilution to produce a dark brown powder. Collection is performed by a metal filter provided on the downstream side of the reaction tube.

[0073] Utilize BET1 point method to measure the specific surface area of ​​the generated powder collected, the result is 55m 2 / g. Chemical analysis shows that the main components are silicon (Si) and oxygen (O). In addition, Si using XPS (X-ray Photoelectron Spectroscopy) 2p As a result of spectroscopically studying the state of the Si bond, in addition to the peaks belonging to the Si-O bond, peaks belonging to the Si-Si bond can be identified, and it can be confirmed that silicon particles are included in the formed silicon oxide particles.

[0074] In an argon atm...

Embodiment 2

[0077] In the same reaction vessel made of quartz glass reaction tubes as in Example 1 maintained at a temperature of 750° C. and a pressure of 50 kPa, monosilane gas, silane gas, and Oxygen and argon for dilution produce a dark brown powder. Collection was performed in the same manner as in Example 1.

[0078] Measure the specific surface area of ​​the collected generated powder, the result is 150m 2 / g. Perform chemical analysis, the main components are Si and oxygen, study XPS of Si 2p As a result of the spectrum, peaks belonging to Si-Si bonds can be identified, and it can also be confirmed that the product is silicon oxide particles enclosing silicon particles.

[0079] A silicon powder was obtained in the same manner as in Example 1, except that 20 g of this powder was kept at a temperature of 900° C. for 1 hour in a helium atmosphere. By chemical analysis, it was confirmed that the main component of the powder was Si, and the total amount of Na, Fe, Al, and Cl was 8...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

PropertyMeasurementUnit
particle diameteraaaaaaaaaa
particle sizeaaaaaaaaaa
particle diameteraaaaaaaaaa
Login to View More

Abstract

The invention relates to a method for producing silicon particles which comprises a step of effecting a gas phase reaction of a mono-silane gas and an oxidizing gas for oxidizing said mono-silane gas, to synthesize silicon oxide particles including silicon particles therein, and a step of holding a powder of said silicon oxide particles in an inert atmosphere at 800 to 1400 DEG C and then removing the above silicon oxide by the use of hydrofluoric acid. The above method allows the production of high purity silicon nano particles exhibiting high practical utility as a raw material powder for a luminescent element and electronic parts having high performance capabilities, on an industrial scale.

Description

technical field [0001] The invention relates to nanometer (nm) size high-purity silicon particles and a preparation method thereof. [0002] In addition, the present invention also relates to a silicon particle superlattice formed by periodically and regularly arranging nanometer (nm) size silicon particles in a two-dimensional or three-dimensional manner and a preparation method thereof. Background technique [0003] Silicon particles (silicon nanoparticles) having nano-order particle diameters have significantly different physical and chemical properties from those of bulk silicon, and therefore have attracted great attention as new functional materials in recent years. For example, based on the confinement effect or surface energy effect of quantum theory, silicon nanoparticles have a different energy band structure from bulk silicon, and can see luminescence that cannot be observed in bulk silicon. Therefore, it is expected to be used as a new type of silicon Applicatio...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Patents(China)
IPC IPC(8): C01B33/029C01B33/02
Inventor 佐藤井一木村启作川崎卓冈田拓也
Owner DENKA CO LTD
Features
  • R&D
  • Intellectual Property
  • Life Sciences
  • Materials
  • Tech Scout
Why Patsnap Eureka
  • Unparalleled Data Quality
  • Higher Quality Content
  • 60% Fewer Hallucinations
Social media
Patsnap Eureka Blog
Learn More

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.

© 2025 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com