Hermetically sealed container for large-sized precision sheet (semi-) product

Abstract

A relatively light and generally resinous hermetically sealed container is provided for accommodating, supporting and transporting a precision sheet (semi-)product, such as a photomask, safely and in an airtight manner without exerting an inappropriate stress thereto, which precision sheet (semi-)product has such a large planar size that encounters an extreme difficulty in integral resin molding of a half of a container therefor. The container includes a main body and a lid member which are generally symmetrical with each other and respectively have sealing peripheries to be abutted to each other. Each of the main body and the lid member includes a plurality of resin-sheets which are disposed in a plane, abutted to each other at an intermediate joint boundary therebetween and joined with each other at the joint boundary. A reinforcing metal belt member is disposed from outside along the joint boundary and hermetically bolted to the resin sheets.

Description

FIELD OF THE INVENTION AND RELATED ART [0001] The present invention relates to a hermetically sealed container suitably used for transportation of a precision sheet (semi-)product, i.e., a precision sheet product or a semi-product thereof before completion of the product such as a (glass) substrate thereof, inclusive of a photomask (including a reticle) or a pelicle as a protective film for such a photomask, a semiconductor wafer-related product, various display products inclusive of a liquid crystal display (LCD),etc., particularly a large-sized precision sheet (semi-)product which is intended herein to mean one which has a large planar size including at least 750 mm for at least one side thereof and a container for which is composed of two halves each of which has such a planar size that integral resin molding thereof is extremely difficult. [0002] A precision sheet (semi-)product as mentioned above is generally mechanically fragile in many cases, and a precision part or member fo...

AI Technical Summary

Benefits of technology

[0003] Accordingly, a principal object of the present invention is to provide a generally resin-made, hermetically sealed container of a relatively light weight capable of safely accommodating and supporting therein a large-sized precisio

Problems solved by technology

A precision sheet (semi-)product as mentioned above is generally mechanically fragile in many cases, and a precision part or member formed thereon is further fragile in many cases.

Especially, such a sheet (semi-)product is frequently exported overseas from Japan by airplane, and minute dirt is liable to be introduced into the container due to a pressure difference between the inner space (particularly, a cargo space) of the airplane and the atmospheric pressure.

Further, as the attachment of minute dirt should be avoided, the formation of a container main body with a foam resin (e.g., Japanese Patent Laid-Open Application (JP-A) 2001-31165) or the disposition of a foam resin cushioning material in a container as frequently exercised for general-purpose glass products since such a foam resin is liable to generate minute dirt due to abrasion.

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